Single probe diagnostics for the study of plasma parameters in the expander of an open magnetic trap

AbstractThe resonant type power supplies of medium frequency designed for magnetron sputtering processes often use pulse density modulation to regulate the average discharge power level. While the output power level changes then number of pulses in a group changes, but the discharge current pulses are the same from pulse to pulse: their parameters (duration time, amplitude) do not change with the discharge power. The goal of this paper is to present the influence of medium frequency discharge power level on the direct current I-V characteristics of a single Langmuir probe and resulting plasma parameters caused by the pulse density modulation. The sputtering processes of titanium and copper were diagnosed at two spatial positions. The measured Langmuir probe I-V characteristics showed strong dependence on the discharge power. As the discharge powering pulses stay the same with the discharge power level change, such influence was unlikely to occur. Using time-resolved analysis of probe current waveforms the origin of this influence was indicated. The influence of discharge power level on the single probe Langmuir I-V characteristics and resulting plasma parameters was eliminated using a simple method of scaling the results. Finally, the reliable plasma parameters were calculated.

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Elevating the Precision of Plasma Probe Diagnostics by Elimination of Bare Probe Protective Shields’ Influence

Journal of Chemistry Education Research and Practice ◽

10.33140/jcerp/01/01/00003 ◽

2017 ◽

Vol 1 (1) ◽

Keyword(s):

Measurement Errors ◽

Plasma Electron ◽

Physical Analysis ◽

Bare Metal ◽

Langmuir Probes ◽

Plasma Parameters ◽

Probe Diagnostics ◽

Plasma Probe ◽

Shield Length ◽

Probe Measurements

Probe diagnostics of the low pressure inductive xenon plasma were conducted using classic cylindrical Langmuir probes with conventional protection of their circuits against radio frequency interferences by bare metal shields. The dimensions of their probetips were determined in the special experiment that provided negligible local plasma distortions. Accurate probe measurements were used to determine the spatial plasma parameter distributions in a gas discharge unit of an ion thruster model which helped to develop its ion-extracting grate. The subsequent analysis of probe measurements showed that in these experiments, the plasma electron energy distribution function (EEDF) was quite noticeably deviated from the Maxwell function depending on the main probe shield length that varied from maximum to zero. Use of an additional probe in the special position where its shield was rather long with zero shield length of the main probe showed that the additional shield lowered all plasma parameters. Comparison of both probes’ data identified the principled relationship between measurement errors and EEDF distortions caused by bare probe shield and this dependence was used to correct the initial probe measurements. Therefore plasma probe diagnostics became more precise due to the lowered influence of the bare probe protective shields. Its physical analysis based on previous authors’ works showed that this effect was caused by a shortcircuited double-probe phenomenon in the bare metal shields.

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