scholarly journals Epitaxial ZnO on p-Si and its MSM Structure Photoconductive Ultraviolet Detector

Author(s):  
Wen’an Zhong ◽  
Jianfeng Liu ◽  
Yu Zhao ◽  
Quanlin Zhang ◽  
Yijun Zhao ◽  
...  
Author(s):  
Xi Wang ◽  
Meng Zhang ◽  
Hongbin Pu ◽  
Jichao Hu ◽  
Qingyang Dong ◽  
...  
Keyword(s):  

2021 ◽  
pp. 50947
Author(s):  
Yida Liu ◽  
Huie Zhu ◽  
Akira Watanabe ◽  
Shunsuke Yamamoto ◽  
Tokuji Miyashita ◽  
...  

Author(s):  
Shuwen Guo ◽  
Xiaolong Zhao ◽  
Yongning He ◽  
Zijian Pan ◽  
Mingchao Yang ◽  
...  

2017 ◽  
Vol 1530 ◽  
pp. 171-175 ◽  
Author(s):  
Huian Liu ◽  
Guy Raffin ◽  
Guillaume Trutt ◽  
Jérôme Randon

2011 ◽  
Vol 28 (5) ◽  
pp. 057802 ◽  
Author(s):  
Bo Gao ◽  
Hong-Xia Liu ◽  
Shu-Long Wang

2001 ◽  
Author(s):  
John V. Vallerga ◽  
Jason B. McPhate ◽  
Adrian P. Martin ◽  
Geoffrey A. Gaines ◽  
Oswald H. W. Siegmund ◽  
...  

2021 ◽  
Vol 21 (10) ◽  
pp. 5157-5164
Author(s):  
Junmyung Lee ◽  
Yeonsik Choi ◽  
Yunho Nam ◽  
Byung Jun Lee ◽  
Hyun Woo Lee ◽  
...  

Silicon oxycarbide (SiOC) film was etched using a CF4/C6F12O/O2 mixed gas plasma through an inductively coupled plasma etcher. Changes in the dielectric constant and surface chemical bonding properties were investigated using ellipsometry and Fourier transform infrared spectroscopy. Plasma diagnosis was carried out using a double Langmuir probe, ultraviolet detector, and residual gas analyzer. The physical and chemical plasma properties of CHF3 and C6F12O exhibited similar trends. However, the C6F12O mixed plasma exhibited a smaller change in dielectric constant compared to that of a conventional CHF3 mixed plasma, because of the lower ion density, ion energy flux, and UV intensity and thinner fluorocarbon-based polymer formation. Therefore, the liquefied C6F12O gas can substitute for the existing etching process gas and reduce the change in dielectric constant.


2021 ◽  
Vol 95 (13) ◽  
pp. 2663-2666
Author(s):  
Jie Ding ◽  
Linghui Ge ◽  
Xiaodong Zhu ◽  
Jiwei Jiao ◽  
Liqiang Zhang ◽  
...  

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