scholarly journals Growth, physical and electrical characterization of nickel oxide thin films prepared by plasma-enhanced atomic layer deposition using nickelocene and oxygen precursors

2020 ◽  
Vol 7 (4) ◽  
pp. 046401
Author(s):  
Lin-Yan Xie ◽  
Dong-Qi Xiao ◽  
Jun-Xiang Pei ◽  
Jingyong Huo ◽  
Xiaohan Wu ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Nickel Oxide ◽  
Electrical Characterization ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Nickel Oxide Thin Films

Atomic Layer Deposition and Characterization of Erbium Oxide-Doped Zirconium Oxide Thin Films

2010 ◽  
Vol 157 (10) ◽  
pp. G193 ◽  
Author(s):  
Aile Tamm ◽  
Marianna Kemell ◽  
Jekaterina Kozlova ◽  
Timo Sajavaara ◽  
Massimo Tallarida ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Zirconium Oxide ◽  
Atomic Layer ◽  
Erbium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition

2019 ◽  
Vol 19 (2) ◽  
pp. 72-81 ◽  
Author(s):  
Xing Li ◽  
Hong-Liang Lu ◽  
Hong-Ping Ma ◽  
Jian-Guo Yang ◽  
Jin-Xin Chen ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Electrical Characterization ◽  
Atomic Layer ◽  
Layer Deposition

Physical and electrical characterization of yttrium-stabilized zirconia (YSZ) thin films deposited by sputtering and atomic-layer deposition

2018 ◽  
Vol 29 (18) ◽  
pp. 15349-15357 ◽  
Author(s):  
Joel Molina-Reyes ◽  
Hugo Tiznado ◽  
Gerardo Soto ◽  
Monica Vargas-Bautista ◽  
David Dominguez ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Electrical Characterization ◽  
Atomic Layer ◽  
Stabilized Zirconia ◽  
Layer Deposition

Characterization of lanthanum lutetium oxide thin films grown by atomic layer deposition as an alternative gate dielectric

2008 ◽  
Vol 517 (1) ◽  
pp. 201-203 ◽  
Author(s):  
M. Roeckerath ◽  
T. Heeg ◽  
J.M.J. Lopes ◽  
J. Schubert ◽  
S. Mantl ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Gate Dielectric ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Lutetium Oxide ◽  
Layer Deposition
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