A way to higher resolution: spherical-aberration correction in a 200 kV transmission electron microscope

1999 ◽  
Vol 48 (6) ◽  
pp. 821-826 ◽  
Author(s):  
K. Urban ◽  
B. Kabius ◽  
M. Haider ◽  
H. Rose
Author(s):  
M. G. R. Thomson

The variation of contrast and signal to noise ratio with change in detector solid angle in the high resolution scanning transmission electron microscope was discussed in an earlier paper. In that paper the conclusions were that the most favourable conditions for the imaging of isolated single heavy atoms were, using the notation in figure 1, either bright field phase contrast with β0⋍0.5 α0, or dark field with an annular detector subtending an angle between ao and effectively π/2.The microscope is represented simply by the model illustrated in figure 1, and the objective lens is characterised by its coefficient of spherical aberration Cs. All the results for the Scanning Transmission Electron Microscope (STEM) may with care be applied to the Conventional Electron Microscope (CEM). The object atom is represented as detailed in reference 2, except that ϕ(θ) is taken to be the constant ϕ(0) to simplify the integration. This is reasonable for θ ≤ 0.1 θ0, where 60 is the screening angle.


2010 ◽  
Vol 16 (4) ◽  
pp. 434-440 ◽  
Author(s):  
Hannes Lichte ◽  
Martin Linck ◽  
Dorin Geiger ◽  
Michael Lehmann

AbstractElectron holography has been shown to allow a posteriori aberration correction. Therefore, an aberration corrector in the transmission electron microscope does not seem to be needed with electron holography to achieve atomic lateral resolution. However, to reach a signal resolution sufficient for detecting single light atoms and very small interatomic fields, the aberration corrector has turned out to be very helpful. The basic reason is the optimized use of the limited number of “coherent” electrons that are provided by the electron source, as described by the brightness. Finally, quantitative interpretation of atomic structures benefits from the holographic facilities of fine-tuning of the aberration coefficients a posteriori and from evaluating both amplitude and phase.


2002 ◽  
Vol 51 (suppl 1) ◽  
pp. S51-S58 ◽  
Author(s):  
Bernd Kabius ◽  
Max Haider ◽  
Stefan Uhlemann ◽  
Eugen Schwan ◽  
Knut Urban ◽  
...  

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