scholarly journals Spherical aberration correction in a scanning transmission electron microscope using a sculpted thin film

2018 ◽  
Vol 189 ◽  
pp. 46-53 ◽  
Author(s):  
Roy Shiloh ◽  
Roei Remez ◽  
Peng-Han Lu ◽  
Lei Jin ◽  
Yossi Lereah ◽  
...  
Author(s):  
M. G. R. Thomson

The variation of contrast and signal to noise ratio with change in detector solid angle in the high resolution scanning transmission electron microscope was discussed in an earlier paper. In that paper the conclusions were that the most favourable conditions for the imaging of isolated single heavy atoms were, using the notation in figure 1, either bright field phase contrast with β0⋍0.5 α0, or dark field with an annular detector subtending an angle between ao and effectively π/2.The microscope is represented simply by the model illustrated in figure 1, and the objective lens is characterised by its coefficient of spherical aberration Cs. All the results for the Scanning Transmission Electron Microscope (STEM) may with care be applied to the Conventional Electron Microscope (CEM). The object atom is represented as detailed in reference 2, except that ϕ(θ) is taken to be the constant ϕ(0) to simplify the integration. This is reasonable for θ ≤ 0.1 θ0, where 60 is the screening angle.


2006 ◽  
Vol 12 (6) ◽  
pp. 442-455 ◽  
Author(s):  
Heiko Müller ◽  
Stephan Uhlemann ◽  
Peter Hartel ◽  
Maximilian Haider

Aberration correctors using hexapole fields have proven useful to correct for the spherical aberration in electron microscopy. We investigate the limits of the present design for the hexapole corrector with respect to minimum probe size for the scanning transmission electron microscope and discuss several ways in which the design could be improved by rather small and incremental design changes for the next generation of advanced probe-forming systems equipped with a gun monochromator.


2006 ◽  
Vol 12 (6) ◽  
pp. 515-526 ◽  
Author(s):  
M. Watanabe ◽  
D.W. Ackland ◽  
A. Burrows ◽  
C.J. Kiely ◽  
D.B. Williams ◽  
...  

A Nion spherical-aberration (Cs) corrector was recently installed on Lehigh University's 300-keV cold field-emission gun (FEG) Vacuum Generators HB 603 dedicated scanning transmission electron microscope (STEM), optimized for X-ray analysis of thin specimens. In this article, the impact of the Cs-corrector on X-ray analysis is theoretically evaluated, in terms of expected improvements in spatial resolution and analytical sensitivity, and the calculations are compared with initial experimental results. Finally, the possibilities of atomic-column X-ray analysis in a Cs-corrected STEM are discussed.


1997 ◽  
Vol 504 ◽  
Author(s):  
David C. Bell ◽  
Anthony J. Garratt-Reed ◽  
Linn W. Hobbst

ABSTRACTRadial density functions (RDFs) provide important information about short- and ntermediaterange structure of topologically-disordered materials such as glasses and irradiation-amorphized materials. We have determined RDFs for irradiation-amorphized SiO2, AIPO4 and SiC by energy-filtered electron diffraction methods in a field-emission scanning transmission electron microscope (FEG-STEM) equipped with a digital parallel-detection electron energy-loss spectrometer. Post-specimen rocking was used to minimize the effects of spherical aberration in the objective lens, which interfere with the acquisition of data collected by pre-specimen rocking. Useful energy-filtered data has been collected beyond an angular range defined by q = 2 sin(Θ/2)/λ = 25 nm−1


Sign in / Sign up

Export Citation Format

Share Document