The distribution of condensed defect structures formed in annealed boron-implanted silicon

1969 ◽  
Vol 311 (1504) ◽  
pp. 75-78 ◽  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Surface Layer ◽  
Electron Beam ◽  
Electron Microscope ◽  
Turbulent Jet ◽  
Doping Profile ◽  
Defect Structures ◽  
Transmission Electron ◽  
Boron Ions

Silicon has been implanted with between 10 14 and 10 16 boron ions/cm 2 at energies of 25, 50, 75 and 100 keV; it has also been annealed at temperatures of between 873 and 1073 °K when the implanted boron ions occupy substitutional sites and form a ‘doped’ surface layer in which the doping profile can be accurately controlled, a desirable property in the manufacture of solid state circuits and devices (Large & Bicknell 1967). The implanted layers have been examined by both electron microscopy and electron diffraction before, during and after annealing to study the changes in crystal structures involved. For transmission electron microscope studies the silicon must be thinned to provide areas less than 1 p m in thickness, otherwise the electron beam is entirely absorbed within the specimen. It has been found that a modified form of jet etching using a turbulent jet enables large areas suitable for transmission electron microscopy to be easily produced from all types of specimens, both annealed and unannealed. Although specimens have been prepared and implanted with boron ions of different energies and doses the results discussed, which are typical of the range covered, are those obtained from silicon implanted with single energy 50 keV boron ions with a dose of 2 x 10 15 ions/cm 2 .

Electron Microscope Investigation of PVD Coated Aluminium Alloy Surface Layer

2012 ◽  
Vol 186 ◽  
pp. 192-197 ◽  
Author(s):  
Tomasz Tański ◽  
Krzysztof Labisz
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Surface Layer ◽  
Electron Microscope ◽  
Aluminium Alloy ◽  
Aluminium Alloys ◽  
Wear Resistant ◽  
Electron Microscope Investigation ◽  
Microscope Investigation ◽  
Transmission Electron

The purpose of this work is electron microscope investigation of the Ti/TiCN/TiAlN and Cr/CrN/CrN coatings deposited by PVD process. The investigations were performed using scanning and transmission electron microscopy for the microstructure determination. By mind of the transmission electron microscopy the high resolution and phase determination was possible to obtain. The morphology was studied as well the lattice parameters for the layer matrix and substrate phase identification using diffraction methods was applied. After the coating of the aluminium alloys AlSi9Cu and AlSi9Cu4 with the selected coatings there are crystallites detected with the size of several tenth of diameter. The investigated samples were examined metallographically using electron microscope with different image techniques, also EDS microanalysis and electron diffraction was made. As an implication for the practice a new layer sequence can be possible to develop, based on PVD technique. Some other investigation should be performed in the future, but the knowledge found in this research shows an interesting investigation direction. The originality and value of this combination of TEM investigation for PVD deposited surface lasers on aluminium alloys makes the investigation very attractive for automotive and other industry branches. Some practical implications and employment of the surface treatment technology for elements, made from tool materials, with the PVD and CVD methods, to obtain the high wear resistant coatings, makes it possible to improve the properties of these materials by – among others – decreasing for example their friction coefficient, microhardness increase, improvement of the tribological contact conditions in practical use. One original value is it also to applied the PVD method on a common material like aluminium alloy. The double layer coatings worked out In the PVD process on the Al0Si-Cu alloys substrate hale the following configuration of the layers: bottom layer/gradient layer/wear resistant hard surface layer.

Annealing Effects in Ten Films of Thoria

1968 ◽  
Vol 26 ◽  
pp. 392-393
Author(s):  
S. E. Bronisz ◽  
Dana L. Douglass
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Transmission Electron Microscopy ◽  
Electron Beam ◽  
Electron Microscope ◽  
Single Crystals ◽  
Crystalline Materials ◽  
Transmission Electron ◽  
Annealing Effects ◽  
Diffraction Effects

Thin films of thoria, either cleaved from air-fired material or vacuum deposited on polished copper substrates, were examined by transmission electron microscopy. As prepared, the two types of samples were considerably different, but after being heated in the electron microscope they were closely similar.The cleaved samples were obtained by means of extraction replication of fracture surfaces of polycrystalline thoria. The thin flakes ranged from about 0.1 to 20 μm in diameter. Most of them were single crystals exhibiting the diffraction effects expected of crystalline materials and containing many long dislocations. Upon heating with the unapertured electron beam the dislocations disappeared, the crystals became more electron transparent, and the striated microstructure shown in Fig. 1 developed. The orientations of most of the cleaved crystals were equally divided among ﹛110﹜, ﹛111﹜, and ﹛112﹜. The striae were usually parallel to <110> or <135>.

Electron beam-induced surface modification and nano-engineering of carbon nanotubes: Single-walled and multiwalled

2006 ◽  
Vol 21 (12) ◽  
pp. 3109-3123 ◽  
Author(s):  
S. Gupta ◽  
R.J. Patel ◽  
R.E. Giedd
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Raman Spectroscopy ◽  
Electron Beam ◽  
Electron Microscope ◽  
High Resolution ◽  
Band Intensity ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron

Influence of low and medium energy electron beam (E-beam) irradiation on the single-walled (SW) and multiwalled (MW) carbon nanotube films grown by microwave chemical vapor deposition are investigated. These films were subjected to electron beam energy of 50 keV from scanning electron microscope for 2.5, 5.5, 8.0, and 15 h and 100, 200, and 300 keV from transmission electron microscope electron gun for a few minutes to approximately 2 h continuously. To assess the surface modifications/structural degradation, the films were analyzed prior to and post-irradiation using x-ray diffraction and micro-Raman spectroscopy in addition to in situ monitoring by scanning and high-resolution transmission electron microscopy. A minimal increase in intertube or interplanar spacing (i.e., d002) for MW nanotubes ranging from 3.25–3.29 Å (∼3%) can be analogized to change in c-axis of graphite lattice due to thermal effects measured using x-ray diffraction. Resonance Raman spectroscopy revealed that irradiation generated defects in the lattice evaluated through variation of: the intensity of radial breathing mode (RBM), intensity ratio of D to G band (ID/IG), position of D and G bands and their harmonics (D* and G*). The increase in the defect-induced D band intensity, quenching of RBM intensity, and only a slight increase in G band intensity are some of the implications. The MW nanotubes tend to reach a state of saturation for prolonged exposures, while SW transforming semiconducting to quasi-metallic character. Softening of the q = 0 selection rule is suggested as a possible way to explain these results. It is also suggestive that knock-on collision may not be the primary cause of structural degradation, rather a local gradual reorganization, i.e., sp2+δ ⇔ sp2+δ, sp2 C seems quite possible. Experiments showed that with extended exposures, both kinds of nanotubes displayed various local structural instabilities including pinching, graphitization/amorphization, and forming intra-molecular junction (IMJ) within the area of electron beam focus possibly through amorphous carbon aggregates. They also displayed curling and closure forming nano-ring and helix-like structures while mending their dangling bonds. High-resolution transmission electron microscopy electrons corroborated these conclusions. Manufacturing of nanoscale structures “nano-engineering” of carbon-based systems is tentatively ascribed to irradiation-induced solid-state phase transformation, in contrast to conventional nanotube synthesis from the gas phase.

Effect of Heavy Mass Ion (Gold) and Light Mass Ion (Boron) Irradiation on Microstructure of Tungsten

2019 ◽  
Vol 25 (6) ◽  
pp. 1442-1448
Author(s):  
Prashant Sharma ◽  
Padivattathumana Maya ◽  
Satyaprasad Akkireddy ◽  
Prakash M. Raole ◽  
Anil K. Tyagi ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Defect Structures ◽  
Transmission Electron ◽  
Tungsten Foil ◽  
The Difference ◽  
Boron Ions ◽  
Small Clusters ◽  
Gold Ion

AbstractThe difference in the defect structures produced by different ion masses in a tungsten lattice is investigated using 80 MeV Au7+ ions and 10 MeV B3+ ions. The details of the defects produced by ions in recrystallized tungsten foil samples are studied using transmission electron microscopy. Dislocations of type b = 1/2[111] and [001] were observed in the analysis. While highly energetic gold ion produced small clusters of defects with very few dislocation lines, boron has produced large and sparse clusters with numerous dislocation lines. The difference in the defect structures could be due to the difference in separation between primary knock-on atoms produced by gold and boron ions.

Detection and Measurement of Intermetallic Thin Films Using EDX Line Scanning

2015 ◽  
Author(s):  
Carl Nail
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Transmission Electron Microscopy ◽  
Electron Beam ◽  
Electron Microscope ◽  
Tem Analysis ◽  
X Ray ◽  
Transmission Electron ◽  
Line Scanning ◽  
Scanning Electron

Abstract Elementally characterizing intermetallic compounds (IMCs) to identify phases has routinely required relatively expensive transmission electron microscopy (TEM) analysis. A study was done characterizing IMCs using less expensive energydispersive x-ray (EDX) spectroscopy tools to investigate it as a practical alternative to TEM. The study found that EDX line scanning can differentiate phases by tracking changes in count rate as the electron beam of a scanning electron microscope (SEM) passes from one phase to another.

Transmission Electron Microscopy a Powerful Means to Investigate the Glazed Coating of Ancient Ceramics

2009 ◽  
Vol 8 ◽  
pp. 141-146 ◽  
Author(s):  
Claude Mirguet ◽  
Christian Roucau ◽  
Philippe Sciau
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Electron Beam ◽  
Electron Microscope ◽  
High Resolution ◽  
Chemical Analysis ◽  
Energy Loss ◽  
X Ray ◽  
Transmission Electron ◽  
Powerful Means

Optical microscopy allows observation of details of the order of micrometers. In an electron microscope that uses an electron beam to make an image, the resolution is a thousand times better. It becomes possible to observe details of the nanometer (nm) in conventional mode and order of the Angstrom (1 Å = 0.1 nm) in high resolution mode. This technique requires a delicate preparation of samples to be sufficiently thin (≤ 100 nm) to allow the passage of electrons to an observation in transmission. The transfer of energy between incident electrons and atoms in the sample are operated through energy loss spectroscopy (EELS) and X-ray emission (EDX) to perform a chemical analysis of the observed object. The purpose of this paper is to show, through some examples, the potential of transmission electron microscopy and related techniques in the study of structure and composition of heritage materials.

Techniques for Transmission Electron Microscopy of Fiber-Matrix Interfaces in Aluminum Alloy-Boron Composites by Ion Erosio

1971 ◽  
Vol 29 ◽  
pp. 204-205
Author(s):  
G. G. Shaw
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Aluminum Alloy ◽  
Electron Beam ◽  
Pure Aluminum ◽  
Ion Milling ◽  
Transmission Electron ◽  
Fiber Matrix ◽  
Ion Erosion ◽  
Row Of Fibers

The morphology and composition of the fiber-matrix interface can best be studied by transmission electron microscopy and electron diffraction. For some composites satisfactory samples can be prepared by electropolishing. For others such as aluminum alloy-boron composites ion erosion is necessary.When one wishes to examine a specimen with the electron beam perpendicular to the fiber, preparation is as follows: A 1/8 in. disk is cut from the sample with a cylindrical tool by spark machining. Thin slices, 5 mils thick, containing one row of fibers, are then, spark-machined from the disk. After spark machining, the slice is carefully polished with diamond paste until the row of fibers is exposed on each side, as shown in Figure 1.In the case where examination is desired with the electron beam parallel to the fiber, preparation is as follows: Experimental composites are usually 50 mils or less in thickness so an auxiliary holder is necessary during ion milling and for easy transfer to the electron microscope. This holder is pure aluminum sheet, 3 mils thick.

Phenomena Associated with Oxygen in Titanium

1967 ◽  
Vol 25 ◽  
pp. 310-311
Author(s):  
E. U. Lee ◽  
P. A. Garner ◽  
J. S. Owens
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Electron Microscope ◽  
Microstructural Changes ◽  
Electrolytic Polishing ◽  
Interstitial Impurities ◽  
Thin Foils ◽  
Transmission Electron ◽  
Iodide Titanium ◽  
Alpha Titanium

Evidence for ordering (1-6) of interstitial impurities (O and C) has been obtained in b.c.c. metals, such as niobium and tantalum. In this paper we report the atomic and microstructural changes in an oxygenated c.p.h. metal (alpha titanium) as observed by transmission electron microscopy and diffraction.Oxygen was introduced into zone-refined iodide titanium sheets of 0.005 in. thickness in an atmosphere of oxygen and argon at 650°C, homogenized at 800°C and furnace-cooled in argon. Subsequently, thin foils were prepared by electrolytic polishing and examined in a JEM-7 electron microscope, operated at 100 KV.

The 1-MeV Electron Microscope Installation at the University of Colorado

1973 ◽  
Vol 31 ◽  
pp. 8-9 ◽  
Author(s):  
Mircea Fotino
Keyword(s):  
Electron Microscopy ◽  
Developmental Biology ◽  
Transmission Electron Microscopy ◽  
Electron Microscope ◽  
National Institutes Of Health ◽  
Experimental Program ◽  
University Of Colorado ◽  
Transmission Electron ◽  
The University ◽  
Research Resources

A new 1-MeV transmission electron microscope (Model JEM-1000) was installed at the Department of Molecular, Cellular and Developmental Biology of the University of Colorado in Boulder during the summer and fall of 1972 under the sponsorship of the Division of Research Resources of the National Institutes of Health. The installation was completed in October, 1972. It is installed primarily for the study of biological materials without many of the limitations hitherto unavoidable in standard transmission electron microscopy. Only the technical characteristics of the installation are briefly reviewed here. A more detailed discussion of the experimental program under way is being published elsewhere.

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