High-field splitting of the cyclotron resonance absorption in strainedp-InGaAs/GaAsquantum wells

2009 ◽  
Vol 79 (7) ◽  
Author(s):  
O. Drachenko ◽  
D. V. Kozlov ◽  
V. Ya. Aleshkin ◽  
V. I. Gavrilenko ◽  
K. V. Maremyanin ◽  
...  
1973 ◽  
Vol 7 (12) ◽  
pp. 5408-5410 ◽  
Author(s):  
Ernest E. H. Shin ◽  
Petros N. Argyres ◽  
Norman J. Morgenstern Horing ◽  
Benjamin Lax

2017 ◽  
Vol 31 (5) ◽  
pp. 4771-4779 ◽  
Author(s):  
Florian Handle ◽  
Mourad Harir ◽  
Josef Füssl ◽  
Ayşe N. Koyun ◽  
Daniel Grossegger ◽  
...  

1974 ◽  
Vol 37 (1) ◽  
pp. 114-121 ◽  
Author(s):  
Eizo Otsuka ◽  
Tyuzi Ohyama ◽  
Toshi Sanada

1991 ◽  
Vol 223 ◽  
Author(s):  
C. A. Pico ◽  
X. Y. Qian ◽  
E. Jones ◽  
M. A. Lieberman ◽  
N. W. Cheung

ABSTRACTPlasma immersion ion implantation (PIII) has been applied to fabricate shallow p-n junction diodes and MOS test structures. BF3 ions created by an electron cyclotron resonance source were implanted into n-type Si(100) at an accelerating voltage of −2 kv. The implant doses ranged from 4 × 1014/cm2 to 4 × 1015/cm2. In some cases, the top layers of the Si(100) substrates were preamorphized by a 3 × 1015/cm2 to 1016/cm2 implant of SiF4 by PIII at −7.2 kV prior to the BF3 implant. The ideality factor exhibited in both non- and preamorphized samples during forward bias is 1.02 to 1.05. Reverse leakages were measured at 30 nA/cm2 at −5V. High frequency capacitance and high field breakdown measurements of the oxide test structures showed no significant damage to the oxide.


Author(s):  
Momoko Onodera ◽  
Miho Arai ◽  
Satoru Masubuchi ◽  
Kei Kinoshita ◽  
Rai Moriya ◽  
...  

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