Interaction between confined phonons and photons in periodic silicon resonators

Physical Review B ◽

10.1103/physrevb.97.094308 ◽

2018 ◽

Vol 97 (9) ◽

Author(s):

A. Iskandar ◽

A. Gwiazda ◽

J. Younes ◽

M. Kazan ◽

A. Bruyant ◽

...

Keyword(s):

Silicon Resonators ◽

Confined Phonons

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Fully single crystal silicon resonators with deep-submicron dry-etched transducer gaps

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290709 ◽

2004 ◽

Author(s):

S. Pourkamali ◽

F. Ayazi

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Deep Submicron ◽

Crystal Silicon ◽

Silicon Resonators

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Optothermal drive of silicon resonators: The influence of surface coatings

Sensors and Actuators A Physical ◽

10.1016/0924-4247(90)85077-h ◽

1990 ◽

Vol 21 (1-3) ◽

pp. 387-390 ◽

Author(s):

R.J. Pitcher ◽

K.W.H. Foulds ◽

J.A. Clements ◽

J.M. Naden

Keyword(s):

Surface Coatings ◽

Silicon Resonators

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High rejection, tunable parallel resonance in micromachined lead zirconate titanate on silicon resonators

Applied Physics Letters ◽

10.1063/1.3636432 ◽

2011 ◽

Vol 99 (10) ◽

pp. 103509 ◽

Author(s):

Sarah S. Bedair ◽

Daniel Judy ◽

Jeffrey Pulskamp ◽

Ronald G. Polcawich ◽

Adam Gillon ◽

...

Keyword(s):

Lead Zirconate Titanate ◽

Lead Zirconate ◽

Zirconate Titanate ◽

Silicon Resonators ◽

Parallel Resonance ◽

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Low Temperature Sub-micron Gap Thin-film Silicon Resonators on Glass Substrate

Procedia Engineering ◽

10.1016/j.proeng.2014.11.710 ◽

2014 ◽

Vol 87 ◽

pp. 1418-1421

Author(s):

J. Mouro ◽

A. Gualdino ◽

L. Teagno ◽

V. Chu ◽

J.P. Conde

Keyword(s):

Thin Film ◽

Low Temperature ◽

Glass Substrate ◽

Thin Film Silicon ◽

Silicon Resonators

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Thermally Actuated Silicon Resonators

Encyclopedia of Nanotechnology ◽

10.1007/978-90-481-9751-4_308 ◽

2012 ◽

pp. 2712-2723

Author(s):

Nezih Pala ◽

Ahmad Nabil Abbas ◽

Carsten Rockstuhl ◽

Christoph Menzel ◽

Stefan Mühlig ◽

...

Keyword(s):

Silicon Resonators ◽

Thermally Actuated

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Effects of Nonequilibrium and Confined Phonons

Frontiers of Research with the Chinese Academy of Sciences - Balance Equation Approach to Electron Transport in Semiconductors ◽

10.1142/9789812819031_0005 ◽

2008 ◽

pp. 127-159

Keyword(s):

Confined Phonons

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Interface disorder effects on confined phonons in semiconductor microstructures

10.1117/12.176856 ◽

1994 ◽

Author(s):

B. Jusserand

Keyword(s):

Disorder Effects ◽

Interface Disorder ◽

Confined Phonons

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Confined phonons effects, phonon-carrier interactions and thermal transport in graphene-based structures

10th IEEE International Conference on Nanotechnology ◽

10.1109/nano.2010.5697806 ◽

2010 ◽

Author(s):

Jun Qian ◽

Ke Sun ◽

Mitra Dutta ◽

Michael A. Stroscio

Keyword(s):

Thermal Transport ◽

Confined Phonons

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Thickness-Harmonic Cross-Sectional Quasi Lamé Modes in Composite Piezo-Silicon Resonators

2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum (EFTF/IFC) ◽

10.1109/fcs.2019.8856055 ◽

2019 ◽

Author(s):

Sarah Shahraini ◽

Hakhamanesh Mansoorzare ◽

Reza Abdolvand

Keyword(s):

Cross Sectional ◽

Silicon Resonators

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Design of Phononic Crystal Tethers for Frequency-selective Quality Factor Enhancement in AlN Piezoelectric-on-silicon Resonators

Procedia Engineering ◽

10.1016/j.proeng.2015.08.689 ◽

2015 ◽

Vol 120 ◽

pp. 516-519 ◽

Author(s):

Haoshen Zhu ◽

Joshua E.-Y. Lee

Keyword(s):

Quality Factor ◽

Phononic Crystal ◽

Frequency Selective ◽

Silicon Resonators

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