scholarly journals Nitrogen atom energy distributions in a hollow-cathode planar sputtering magnetron

2000 ◽  
Vol 61 (2) ◽  
pp. 1904-1911 ◽  
Author(s):  
Zhehui Wang ◽  
Samuel A. Cohen ◽  
David N. Ruzic ◽  
M. J. Goeckner
10.2172/8184 ◽  
1999 ◽  
Author(s):  
D.N. Ruzic ◽  
M.J. Goeckner ◽  
Samuel A. Cohen ◽  
Zhehui Wang

2013 ◽  
Vol 22 (2) ◽  
pp. 025022 ◽  
Author(s):  
Miguel Jiménez-Redondo ◽  
Esther Carrasco ◽  
Víctor J Herrero ◽  
Isabel Tanarro

1989 ◽  
Vol 162-164 ◽  
pp. 482-488 ◽  
Author(s):  
S.J. Fielding ◽  
P.C. Johnson ◽  
M.J. Forrest ◽  
D. Guilhem ◽  
G.F. Matthews

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