Ion energy distributions for the identification of active species and processes in low pressure hollow cathode discharges

Downstream Ion Energy Distributions in a Hollow Cathode Ring Cusp Discharge

Journal of Propulsion and Power ◽

10.2514/1.4771 ◽

2005 ◽

Vol 21 (1) ◽

pp. 144-151 ◽

Cited By ~ 16

Author(s):

John E. Foster ◽

Michael J. Patterson

Keyword(s):

Hollow Cathode ◽

Energy Distributions ◽

Ion Energy ◽

Electric field strengths, ion energy distributions, and ion density decay for low-pressure, moderate-current nitrogen discharges

Physical Review E ◽

10.1103/physreve.50.1399 ◽

1994 ◽

Vol 50 (2) ◽

pp. 1399-1412 ◽

Cited By ~ 18

Author(s):

Jacek Borysow ◽

A. V. Phelps

Keyword(s):

Electric Field ◽

Low Pressure ◽

Energy Distributions ◽

Ion Density ◽

Ion Energy ◽

Field Strengths

Use of ion-energy distributions for the identification of species and production mechanisms in low-pressure DC discharges

Journal of Mass Spectrometry ◽

10.1002/jms.1388 ◽

2008 ◽

Vol 43 (8) ◽

pp. 1148-1150 ◽

Cited By ~ 7

Author(s):

Víctor J. Herrero ◽

Andrey M. Islyaikin ◽

Isabel Tanarro

Keyword(s):

Low Pressure ◽

Energy Distributions ◽

Ion Energy ◽

Identification Of Species ◽

Production Mechanisms

Spatially Mapping the Ion Energy Distributions in Hollow Cathode Discharges

44th AIAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit ◽

10.2514/6.2008-5206 ◽

2008 ◽

Author(s):

JoHanna Przybylowski ◽

James Polk ◽

Joseph Shepherd

Keyword(s):

Hollow Cathode ◽

Energy Distributions ◽

Ion Energy ◽

S055032 Ion energy distributions at the substrate in low pressure inductively coupled plasmas

The Proceedings of Mechanical Engineering Congress Japan ◽

10.1299/jsmemecj.2012._s055032-1 ◽

2012 ◽

Vol 2012 (0) ◽

pp. _S055032-1-_S055032-3

Author(s):

Lizhu TONG

Keyword(s):

Low Pressure ◽

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Ion Energy ◽

Inductively Coupled ◽

Coupled Plasmas

Retarding‐field analyzer for measurements of ion energy distributions and secondary electron emission coefficients in low‐pressure radio frequency discharges

Review of Scientific Instruments ◽

10.1063/1.1144398 ◽

1993 ◽

Vol 64 (1) ◽

pp. 31-44 ◽

Cited By ~ 179

Author(s):

Christian Böhm ◽

Jérôme Perrin

Keyword(s):

Radio Frequency ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Low Pressure ◽

Energy Distributions ◽

Ion Energy ◽

Radio Frequency Discharges ◽

Ion energy distributions and the density of CH3 radicals in a low pressure inductively coupled CH4/H2 plasma used for nanocrystalline diamond deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1621404 ◽

2003 ◽

Vol 21 (6) ◽

pp. 1988-1992 ◽

Cited By ~ 9

Author(s):

Katsuyuki Okada ◽

Shojiro Komatsu ◽

Seiichiro Matsumoto

Keyword(s):

Low Pressure ◽

Nanocrystalline Diamond ◽

Energy Distributions ◽

Diamond Deposition ◽

Ion Energy ◽

Inductively Coupled ◽

Chemical state profiles from secondary ion energy distributions

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.574973 ◽

1988 ◽

Vol 6 (1) ◽

pp. 81-85 ◽

Cited By ~ 4

Author(s):

J. S. Solomon

Keyword(s):

Chemical State ◽

Energy Distributions ◽

Ion Energy ◽

Secondary Ion

Ion Energy Distributions in Multifrequency Capacitive Discharges

2007 IEEE 34th International Conference on Plasma Science (ICOPS) ◽

10.1109/ppps.2007.4345772 ◽

2007 ◽

Author(s):

Alan C. Wu ◽

Michael A. Lieberman ◽

John P. Verboncoeur

Keyword(s):

Energy Distributions ◽

Ion Energy ◽

Capacitive Discharges

Spatiotemporal characteristics of the collisionless rf sheath and the ion energy distributions arriving at rf-biased electrodes

Physical Review E ◽

10.1103/physreve.65.036403 ◽

2002 ◽

Vol 65 (3) ◽

Cited By ~ 46

Author(s):

Zhong-Ling Dai ◽

You-Nian Wang ◽

Teng-Cai Ma

Keyword(s):

Energy Distributions ◽

Ion Energy ◽

Spatiotemporal Characteristics ◽