Ion energy distribution function in dual-frequency rf capacitively coupled discharges: Analytical model

2008 ◽  
Vol 78 (2) ◽  
Author(s):  
M. Olevanov ◽  
O. Proshina ◽  
T. Rakhimova ◽  
D. Voloshin
Keyword(s):  
Distribution Function ◽  
Energy Distribution ◽  
Analytical Model ◽  
Energy Distribution Function ◽  
Dual Frequency ◽  
Ion Energy ◽  
Capacitively Coupled ◽  
Ion Energy Distribution

Experimental and Theoretical Study of Ion Energy Distribution Function in Single and Dual Frequency RF Discharges

2007 ◽  
Vol 35 (5) ◽  
pp. 1229-1240 ◽  
Author(s):  
Tatyana V. Rakhimova ◽  
Oleg V. Braginsky ◽  
Vladimir V. Ivanov ◽  
Alexander S. Kovalev ◽  
Dmitry V. Lopaev ◽  
...  
Keyword(s):  
Distribution Function ◽  
Energy Distribution ◽  
Theoretical Study ◽  
Energy Distribution Function ◽  
Dual Frequency ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Rf Discharges
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