The goal of this paper is first to critical review the charging phenomena occurring during electron deposition in insulating materials. In this research we focus on the elucidation of the charging kinetics including the effects of the electron emission increasing and the electron-radiation defect creation.
In order to avoid some misinterpretation and contradiction of the experimental results we include three fundamental key factors. The first, in the consideration we include the density of the initial (intrinsic) and radiation-induced trapping sites, second, we take into account the role of the primary thermalized electrons in the emission, and third, the charging phenomena in steady-state phase is regulated by the electronic filed, generated during charging.
Deterministic Role of Collision Cascade Density in Radiation Defect Dynamics in Si
