Single-Crystal Micro-Raman Spectroscopy of Phases in the Y-Ba-Cu-O Superconductor

1987 ◽  
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H. K. Mao
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Masanori Tanaka ◽  
Taizoh Sadoh ◽  
Masanobu Miyao ◽  
...  

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...  

1998 ◽  
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Abstract It is shown, using micro-Raman spectroscopy, that Shallow Trench Isolation introduces high stresses in the active area of silicon devices when wet oxidation steps are used. These stresses result in defect formation in the active area, leading to high diode leakage currents. The stress levels are highest near the outer edges of line structures and at square structures. They also increase with decreasing active area dimensions.


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