Formation of swift heavy ion tracks on a rutile TiO2 (001) surface

Nanostructuring of surfaces and two-dimensional materials using swift heavy ions offers some unique possibilities owing to the deposition of a large amount of energy localized within a nanoscale volume surrounding the ion trajectory. To fully exploit this feature, the morphology of nanostructures formed after ion impact has to be known in detail. In the present work the response of a rutile TiO2 (001) surface to grazing-incidence swift heavy ion irradiation is investigated. Surface ion tracks with the well known intermittent inner structure were successfully produced using 23 MeV I ions. Samples irradiated with different ion fluences were investigated using atomic force microscopy and grazing-incidence small-angle X-ray scattering. With these two complementary approaches, a detailed description of the swift heavy ion impact sites, i.e. the ion tracks on the surface, can be obtained even for the case of multiple ion track overlap. In addition to the structural investigation of surface ion tracks, the change in stoichiometry of the rutile TiO2 (001) surface during swift heavy ion irradiation was monitored using in situ time-of-flight elastic recoil detection analysis, and a preferential loss of oxygen was found.

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Ion tracks formation through synergistic energy processes in strontium titanate under swift heavy ion irradiation: Experimental and theoretical approaches

Materialia ◽

10.1016/j.mtla.2019.100402 ◽

2019 ◽

Vol 7 ◽

pp. 100402 ◽

Cited By ~ 3

Author(s):

Yong Liu ◽

Xinqing Han ◽

Miguel L. Crespillo ◽

Qing Huang ◽

Peng Liu ◽

...

Keyword(s):

Strontium Titanate ◽

Ion Irradiation ◽

Heavy Ion ◽

Swift Heavy Ion Irradiation ◽

Ion Tracks ◽

Heavy Ion Irradiation ◽

Theoretical Approaches ◽

Swift Heavy Ion ◽

Energy Processes

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Swift Heavy Ion Irradiation Induced Effects in Si/SiOx Multi-Layered Films and Nanostructures

MRS Proceedings ◽

10.1557/proc-1181-dd04-01 ◽

2009 ◽

Vol 1181 ◽

Author(s):

Jurgen W Gerlach ◽

C. Patzig ◽

W. Assmann ◽

A. Bergmaier ◽

Th. Höche ◽

...

Keyword(s):

Ion Irradiation ◽

Incidence Angle ◽

Ion Beam ◽

Heavy Ion ◽

Ion Beam Sputtering ◽

Elastic Recoil ◽

Swift Heavy Ion Irradiation ◽

Heavy Ion Irradiation ◽

Swift Heavy Ion ◽

Glancing Angle

AbstractAmorphous Si/SiOx multi-layered films and nanostructures were deposited on Si substrates by the glancing angle deposition technique using Ar ion beam sputtering of a Si sputter target in an intermittent oxygen atmosphere at room temperature. The chemical composition of the samples was characterized by time-of-flight secondary ion mass spectrometry, as well as - for quantifying these first results - by elastic recoil detection analysis using a 200 MeV Au ion beam. The latter method was found to lead to a significant alteration of the sample morphology, resulting in the formation of complex nanometric structures within the layer stacks. In order to investigate these swift heavy ion irradiation induced effects in more detail, a series of experiments was conducted to determine the dominating influences. For this purpose, specific glancing angle deposited multilayered films and nanostructures were irradiated to constant ion fluence with the same 200 MeV Au ion beam at different incidence angles. Scanning electron microscopy of the stacks before and after swift Au ion irradiation revealed considerable changes in film morphology and density as a function of the ion incidence angle, such as an increased porosity of the silicon layers, accompanied by a layer swelling. In contrast, the SiOx layers did not show such effects, but exhibited clearly visible swift heavy ion tracks. The observed effects became stronger with decreasing ion incidence angle.

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