Fabrication of submicron junctions-proximity rapid thermal diffusion of phosphorus, boron, and arsenic

1994 ◽  
Vol 41 (12) ◽  
pp. 2281-2290 ◽  
Author(s):  
W. Zagozdzon-Wosik ◽  
P.B. Grabiec ◽  
G. Lux
2004 ◽  
Vol 40 (1) ◽  
pp. 83 ◽  
Author(s):  
L.-E. Wernersson ◽  
S. Kabeer ◽  
V. Zela ◽  
E. Lind ◽  
J. Zhang ◽  
...  

2000 ◽  
Vol 21 (6) ◽  
pp. 274-276 ◽  
Author(s):  
S. Sivoththaman ◽  
W. Laureys ◽  
P. De Schepper ◽  
J. Nijs ◽  
R. Mertens

1998 ◽  
Vol 27 (12) ◽  
pp. 1315-1322 ◽  
Author(s):  
S. Noël ◽  
L. Ventura ◽  
A. Slaoui ◽  
J. C. Muller ◽  
B. Groh ◽  
...  

1996 ◽  
Vol 35 (Part 2, No. 12A) ◽  
pp. L1554-L1557 ◽  
Author(s):  
Seung-Man Park ◽  
Jae Mook Kim ◽  
Hee Chul Lee ◽  
Choong-Ki Kim

1984 ◽  
Vol 131 (10) ◽  
pp. 2387-2394 ◽  
Author(s):  
R. B. Fair ◽  
J. J. Wortman ◽  
J. Liu

2000 ◽  
Vol 73 (1-3) ◽  
pp. 168-172 ◽  
Author(s):  
M Nolan ◽  
T Perova ◽  
R.A Moore ◽  
C.J Moore ◽  
K Berwick ◽  
...  

1992 ◽  
Vol 13 (1) ◽  
pp. 59-60
Author(s):  
A. Usami ◽  
A. Kitagawa ◽  
T. Wada ◽  
M. Suzuki ◽  
Y. Tokuda ◽  
...  

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