Implementation and characterization of self-aligned double-gate TFT with thin channel and thick source/drain

Shengdong Zhang;  Ruqi Han; J.K.O. Sin;  Mansun Chan

doi:10.1109/16.998576

Implementation and characterization of self-aligned double-gate TFT with thin channel and thick source/drain

IEEE Transactions on Electron Devices ◽

10.1109/16.998576 ◽

2002 ◽

Vol 49 (5) ◽

pp. 718-724 ◽

Cited By ~ 19

Author(s):

Shengdong Zhang ◽

Ruqi Han ◽

J.K.O. Sin ◽

Mansun Chan

Keyword(s):

Double Gate ◽

Thin Channel ◽

Thick Source

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Parameter characterization of double gate ultra-thin SOI MOSFET

Proceedings. IEEE International SOI Conference ◽

10.1109/soi.1994.514220 ◽

2002 ◽

Author(s):

Jyi-Tsong Lin

Keyword(s):

Double Gate ◽

Soi Mosfet

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Fabrication and characterization of vertical-type double-gate metal-oxide-semiconductor field-effect transistor with ultrathin Si channel and self-aligned source and drain

Applied Physics Letters ◽

10.1063/1.2173715 ◽

2006 ◽

Vol 88 (7) ◽

pp. 072103 ◽

Cited By ~ 7

Author(s):

Meishoku Masahara ◽

Yongxun Liu ◽

Kazuhiko Endo ◽

Takashi Matsukawa ◽

Kunihiro Sakamoto ◽

...

Keyword(s):

Metal Oxide ◽

Field Effect ◽

Field Effect Transistor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Double Gate ◽

Effect Transistor ◽

Fabrication And Characterization

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C-V characterization of triple gate (TG) and double gate (DG) silicon on insulator (SOI) FinFETs using self-consistent method: A comparative study

2009 International Semiconductor Device Research Symposium ◽

10.1109/isdrs.2009.5378080 ◽

2009 ◽

Author(s):

Md. Zunaid Baten ◽

Raisul Islam ◽

Emran Md. Amin ◽

Quazi D. M. Khosru

Keyword(s):

Comparative Study ◽

Silicon On Insulator ◽

Double Gate ◽

Self Consistent ◽

Consistent Method

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Self consistent simulation for C-V characterization of sub 10nm Tri-Gate and Double Gate SOI FinFETs incorporating quantum mechanical effects

2009 IEEE Student Conference on Research and Development (SCOReD) ◽

10.1109/scored.2009.5443019 ◽

2009 ◽

Cited By ~ 1

Author(s):

Md. Zunaid Baten ◽

Raisul Islam ◽

Emran Md. Amin ◽

Quazi D. M. Khosru

Keyword(s):

Quantum Mechanical ◽

Double Gate ◽

Mechanical Effects ◽

Self Consistent ◽

Quantum Mechanical Effects

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Fabrication and characterization of 100-nm In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As double-gate HEMTs with two separate gate controls

IEEE Electron Device Letters ◽

10.1109/led.2005.854353 ◽

2005 ◽

Vol 26 (9) ◽

pp. 601-603 ◽

Cited By ~ 19

Author(s):

N. Wichmann ◽

I. Duszynski ◽

X. Wallart ◽

S. Bollaert ◽

A. Cappy

Keyword(s):

Double Gate ◽

Fabrication And Characterization

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Characterization of double gate TFTs fabricated in advanced SLS ELA polycrystalline silicon films

Solid-State Electronics ◽

10.1016/j.sse.2007.04.003 ◽

2007 ◽

Vol 51 (6) ◽

pp. 936-940 ◽

Cited By ~ 12

Author(s):

Dimitrios N. Kouvatsos ◽

Filippos V. Farmakis ◽

Despina C. Moschou ◽

Giannis P. Kontogiannopoulos ◽

George J. Papaioannou ◽

...

Keyword(s):

Polycrystalline Silicon ◽

Silicon Films ◽

Double Gate ◽

Polycrystalline Silicon Films

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Fabrication and characterization of fin SONOS flash memory with separated double-gate structure

Solid-State Electronics ◽

10.1016/j.sse.2008.06.021 ◽

2008 ◽

Vol 52 (10) ◽

pp. 1498-1504 ◽

Cited By ~ 8

Author(s):

Jang-Gn Yun ◽

Yoon Kim ◽

Il Han Park ◽

Jung Hoon Lee ◽

Sangwoo Kang ◽

...

Keyword(s):

Flash Memory ◽

Double Gate ◽

Gate Structure ◽

Fabrication And Characterization

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Characterization of Double Gate TFET using Different Dielectric Materials

IJIREEICE ◽

10.17148/ijireeice.2017.5510 ◽

2017 ◽

Vol 5 (5) ◽

pp. 52-56

Author(s):

R. Abisha Herline ◽

Mr. Darwin S.

Keyword(s):

Dielectric Materials ◽

Double Gate

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Analytical Approximation of Quantum Mechanical Tunneling and Characterization of Nano-Scale Heterojunction Double Gate Tunnel FETs

2019 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) ◽

10.1109/marss.2019.8860906 ◽

2019 ◽

Author(s):

S. Poorvasha ◽

B. Lakshmi

Keyword(s):

Analytical Approximation ◽

Quantum Mechanical ◽

Double Gate ◽

Quantum Mechanical Tunneling ◽

Nano Scale ◽

Tunnel Fets

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Characterization of Nonspecific Crossover in Split-Flow Thin Channel Fractionation

Analytical Chemistry ◽

10.1021/ac800841q ◽

2008 ◽

Vol 80 (18) ◽

pp. 7105-7115 ◽

Cited By ~ 11

Author(s):

P. Stephen Williams ◽

Mauricio Hoyos ◽

Pascal Kurowski ◽

Dorra Salhi ◽

Lee R. Moore ◽

...

Keyword(s):

Split Flow ◽

Thin Channel

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