Thin-film bulk acoustic resonators and filters using ZnO and lead-zirconium-titanate thin films

2001 ◽  
Vol 49 (4) ◽  
pp. 769-778 ◽  
Author(s):  
Q.-X. Su ◽  
P. Kirby ◽  
E. Komuro ◽  
M. Imura ◽  
Q. Zhang ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Zirconium Titanate ◽  
Lead Zirconium Titanate ◽  
Acoustic Resonators ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk

scholarly journals High coupling piezoelectric thin films of Pb(Zr,Ti)O3-based ternary perovskite compounds for GHz-range film bulk acoustic resonators

2009 ◽  
Vol 94 (17) ◽  
pp. 172903 ◽  
Author(s):  
N. Yamauchi ◽  
T. Shirai ◽  
T. Yoshihara ◽  
Y. Hayasaki ◽  
T. Ueda ◽  
...  
Keyword(s):  
Thin Films ◽  
Acoustic Resonators ◽  
Piezoelectric Thin Films ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk

PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBARs)

1999 ◽  
Vol 35 (10) ◽  
pp. 794 ◽  
Author(s):  
R. Ruby ◽  
P. Bradley ◽  
J.D. Larson ◽  
Y. Oshmyansky
Keyword(s):  
Thin Film ◽  
Acoustic Resonators ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk

Electromechanical properties of Al0.9Sc0.1N thin films evaluated at 2.5 GHz film bulk acoustic resonators

2011 ◽  
Vol 99 (9) ◽  
pp. 092903 ◽  
Author(s):  
Ramin Matloub ◽  
Alvaro Artieda ◽  
Cosmin Sandu ◽  
Evgeny Milyutin ◽  
Paul Muralt
Keyword(s):  
Thin Films ◽  
Electromechanical Properties ◽  
Acoustic Resonators ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk

Super-High-Frequency Band Filters Configured with Air-Gap-Type Thin-Film Bulk Acoustic Resonators

2010 ◽  
Vol 49 (7) ◽  
pp. 07HD13 ◽  
Author(s):  
Motoaki Hara ◽  
Tsuyoshi Yokoyama ◽  
Takeshi Sakashita ◽  
Shinji Taniguchi ◽  
Masafumi Iwaki ◽  
...  
Keyword(s):  
Thin Film ◽  
Frequency Band ◽  
High Frequency ◽  
Air Gap ◽  
High Frequency Band ◽  
Acoustic Resonators ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk ◽  
Super High Frequency

Electro-acoustic hysteresis behaviour of PZT thin film bulk acoustic resonators

2004 ◽  
Vol 24 (6) ◽  
pp. 1589-1592 ◽  
Author(s):  
M. Schreiter ◽  
R. Gabl ◽  
D. Pitzer ◽  
R. Primig ◽  
W. Wersing
Keyword(s):  
Thin Film ◽  
Acoustic Resonators ◽  
Pzt Thin Film ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk ◽  
Hysteresis Behaviour
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