Frequency effects in capacitively coupled radio-frequency glow discharges: a comparison between a 2-D fluid model and experiments

Frequency effects in capacitively coupled radio‐frequency glow discharges: A comparison between experiments and a two‐dimensional fluid model

10.1063/1.111806 ◽

1994 ◽

Vol 64 (14) ◽

pp. 1780-1782 ◽

Cited By ~ 6

Author(s):

P. M. Meijer ◽

J. D. P. Passchier ◽

W. J. Goedheer ◽

J. Bezemer ◽

W. G. J. H. M. van Sark

Keyword(s):

Radio Frequency ◽

Fluid Model ◽

Two Dimensional ◽

Capacitively Coupled ◽

Frequency Effects ◽

Radial flow effects in a multidimensional, three‐moment fluid model of radio frequency glow discharges

10.1063/1.108937 ◽

1993 ◽

Vol 62 (5) ◽

pp. 473-475 ◽

Cited By ~ 10

Author(s):

Fongray F. Young ◽

Chwan‐Hwa Wu

Keyword(s):

Radio Frequency ◽

Radial Flow ◽

Fluid Model ◽

Glow Discharges ◽

Flow Effects

Hybrid Modeling of a Capacitively Coupled Radio Frequency Glow Discharge in Argon: Combined Monte Carlo and Fluid Model

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.4404 ◽

1999 ◽

Vol 38 (Part 1, No. 7B) ◽

pp. 4404-4415 ◽

Cited By ~ 43

Author(s):

Annemie Bogaerts ◽

Renaat Gijbels ◽

Wim Goedheer

Keyword(s):

Monte Carlo ◽

Glow Discharge ◽

Radio Frequency ◽

Fluid Model ◽

Hybrid Modeling ◽

Capacitively Coupled ◽

Radio Frequency Glow Discharge

Comparison of a one-dimensional particle-in-cell–Monte Carlo model and a one-dimensional fluid model for a CH[sub 4]/H[sub 2] capacitively coupled radio frequency discharge

Journal of Applied Physics ◽

10.1063/1.1461895 ◽

2002 ◽

Vol 91 (10) ◽

pp. 6296 ◽

Cited By ~ 30

Author(s):

Vladimir Ivanov ◽

Olga Proshina ◽

Tatyana Rakhimova ◽

Alexander Rakhimov ◽

Dieter Herrebout ◽

...

Keyword(s):

Monte Carlo ◽

Radio Frequency ◽

Fluid Model ◽

Monte Carlo Model ◽

Capacitively Coupled ◽

One Dimensional ◽

Particle In Cell ◽

Radio Frequency Discharge

A particle-in-cell fluid model for radio frequency glow discharges

Computers in Physics ◽

10.1063/1.168465 ◽

1993 ◽

Vol 7 (3) ◽

pp. 363

Author(s):

Chihwen ‘‘Chris’’ Li ◽

Chwan-Hwa ‘‘John’’ Wu

Keyword(s):

Radio Frequency ◽

Fluid Model ◽

Particle In Cell ◽

Modeling of a capacitively coupled radio-frequency methane plasma: Comparison between a one-dimensional and a two-dimensional fluid model

Journal of Applied Physics ◽

10.1063/1.1500789 ◽

2002 ◽

Vol 92 (5) ◽

pp. 2290-2295 ◽

Cited By ~ 17

Author(s):

D. Herrebout ◽

A. Bogaerts ◽

M. Yan ◽

R. Gijbels ◽

W. Goedheer ◽

...

Keyword(s):

Radio Frequency ◽

Fluid Model ◽

Two Dimensional ◽

Capacitively Coupled ◽

One Dimensional

Synergy Effect of Particle Radiation and Ultraviolet Radiation from Capacitively Coupled Radio Frequency Argon Plasmas on n-GaN Etching Damage

Japanese Journal of Applied Physics ◽

10.1143/jjap.47.6863 ◽

2008 ◽

Vol 47 (8) ◽

pp. 6863-6866 ◽

Cited By ~ 24

Author(s):

Retsuo Kawakami ◽

Takeshi Inaoka ◽

Kikuo Tominaga ◽

Akinobu Kuwahara ◽

Takashi Mukai

Keyword(s):

Ultraviolet Radiation ◽

Radio Frequency ◽

Synergy Effect ◽

Particle Radiation ◽

Capacitively Coupled ◽

Argon Plasmas ◽

Gan Etching

Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas

10.1063/1.3058686 ◽

2008 ◽

Vol 93 (26) ◽

pp. 261503 ◽

Cited By ~ 68

Author(s):

D. W. Liu ◽

F. Iza ◽

M. G. Kong

Keyword(s):

Radio Frequency ◽

Atmospheric Pressure ◽

Electron Heating ◽

Capacitively Coupled ◽

Atmospheric Pressure Plasmas

Continuum modeling of argon radio frequency glow discharges

10.1063/1.98183 ◽

1987 ◽

Vol 50 (9) ◽

pp. 492-494 ◽

Cited By ~ 170

Author(s):

Albert D. Richards ◽

Brian E. Thompson ◽

Herbert H. Sawin

Keyword(s):

Radio Frequency ◽

Continuum Modeling ◽

The driving frequency effects on the atmospheric pressure corona jet plasmas from low frequency to radio frequency

Physics of Plasmas ◽

10.1063/1.3574256 ◽

2011 ◽

Vol 18 (4) ◽

pp. 043503 ◽

Cited By ~ 19

Author(s):

Dan Bee Kim ◽

H. Jung ◽

B. Gweon ◽

S. Y. Moon ◽

J. K. Rhee ◽

...

Keyword(s):

Radio Frequency ◽

Atmospheric Pressure ◽

Low Frequency ◽

Driving Frequency ◽

Frequency Effects