Radial flow effects in a multidimensional, three‐moment fluid model of radio frequency glow discharges

1993 ◽  
Vol 62 (5) ◽  
pp. 473-475 ◽  
Author(s):  
Fongray F. Young ◽  
Chwan‐Hwa Wu
Keyword(s):  
Radio Frequency ◽  
Radial Flow ◽  
Fluid Model ◽  
Glow Discharges ◽  
Flow Effects

Frequency effects in capacitively coupled radio‐frequency glow discharges: A comparison between experiments and a two‐dimensional fluid model

1994 ◽  
Vol 64 (14) ◽  
pp. 1780-1782 ◽  
Author(s):  
P. M. Meijer ◽  
J. D. P. Passchier ◽  
W. J. Goedheer ◽  
J. Bezemer ◽  
W. G. J. H. M. van Sark
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Frequency Effects ◽  
Glow Discharges

A particle-in-cell fluid model for radio frequency glow discharges

1993 ◽  
Vol 7 (3) ◽  
pp. 363
Author(s):  
Chihwen ‘‘Chris’’ Li ◽  
Chwan-Hwa ‘‘John’’ Wu
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Particle In Cell ◽  
Glow Discharges

Frequency effects in capacitively coupled radio-frequency glow discharges: a comparison between a 2-D fluid model and experiments

1995 ◽  
Vol 23 (4) ◽  
pp. 644-649 ◽  
Author(s):  
W.J. Goedheer ◽  
P.M. Meijer ◽  
J. Bezemer ◽  
J. Diederick ◽  
J.D.P. Passchier ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Capacitively Coupled ◽  
Frequency Effects ◽  
Glow Discharges

Continuum modeling of argon radio frequency glow discharges

1987 ◽  
Vol 50 (9) ◽  
pp. 492-494 ◽  
Author(s):  
Albert D. Richards ◽  
Brian E. Thompson ◽  
Herbert H. Sawin
Keyword(s):  
Radio Frequency ◽  
Continuum Modeling ◽  
Glow Discharges

A self-consistent fluid model for radio-frequency discharges in SiH4–H2 compared to experiments

1997 ◽  
Vol 82 (5) ◽  
pp. 2060-2071 ◽  
Author(s):  
G. J. Nienhuis ◽  
W. J. Goedheer ◽  
E. A. G. Hamers ◽  
W. G. J. H. M. van Sark ◽  
J. Bezemer
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Self Consistent ◽  
Radio Frequency Discharges

Measurements in silane radio frequency glow discharges using a tuned and heated Langmuir probe

1993 ◽  
Vol 74 (8) ◽  
pp. 4899-4902 ◽  
Author(s):  
Quixun Lin ◽  
Xuangying Lin ◽  
Yunpeng Yu ◽  
Hong Wang ◽  
Jiayi Chen
Keyword(s):  
Radio Frequency ◽  
Langmuir Probe ◽  
Glow Discharges

Discharge ignition characteristics of pulsed radio-frequency glow discharges in atmospheric helium

2009 ◽  
Vol 16 (7) ◽  
pp. 070702 ◽  
Author(s):  
Jianjun Shi ◽  
Yeqing Cai ◽  
Jie Zhang ◽  
Ke Ding ◽  
Jing Zhang
Keyword(s):  
Radio Frequency ◽  
Glow Discharges ◽  
Discharge Ignition ◽  
Ignition Characteristics

scholarly journals Electron trapping in radio-frequency atmospheric-pressure glow discharges

2007 ◽  
Vol 90 (4) ◽  
pp. 041502 ◽  
Author(s):  
D. W. Liu ◽  
J. J. Shi ◽  
M. G. Kong
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Electron Trapping ◽  
Glow Discharges
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