Frequency effects in capacitively coupled radio‐frequency glow discharges: A comparison between experiments and a two‐dimensional fluid model
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1995 ◽
Vol 23
(4)
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pp. 644-649
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2002 ◽
Vol 11
(4)
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pp. 448-465
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1996 ◽
Vol 51
(7)
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pp. 1089-1106
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2005 ◽
Vol 14
(2)
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pp. 209-218
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2005 ◽
Vol 33
(2)
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pp. 615-623
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