Synergy Effect of Particle Radiation and Ultraviolet Radiation from Capacitively Coupled Radio Frequency Argon Plasmas on n-GaN Etching Damage

2008 ◽  
Vol 47 (8) ◽  
pp. 6863-6866 ◽  
Author(s):  
Retsuo Kawakami ◽  
Takeshi Inaoka ◽  
Kikuo Tominaga ◽  
Akinobu Kuwahara ◽  
Takashi Mukai
Keyword(s):  
Ultraviolet Radiation ◽  
Radio Frequency ◽  
Synergy Effect ◽  
Particle Radiation ◽  
Capacitively Coupled ◽  
Argon Plasmas ◽  
Gan Etching

Effects of Capacitively Coupled Radio Frequency Krypton and Argon Plasmas on Gallium Nitride Etching Damage

2009 ◽  
Vol 48 (8) ◽  
pp. 08HF01 ◽  
Author(s):  
Retsuo Kawakami ◽  
Takeshi Inaoka ◽  
Kikuo Tominaga ◽  
Takashi Mukai
Keyword(s):  
Gallium Nitride ◽  
Radio Frequency ◽  
Capacitively Coupled ◽  
Argon Plasmas

Comparison between Damage Characteristics of p- and n-GaN Surfaces Etched by Capacitively Coupled Radio Frequency Argon Plasmas

2013 ◽  
Vol 52 (5S2) ◽  
pp. 05EC05 ◽  
Author(s):  
Retsuo Kawakami ◽  
Masahito Niibe ◽  
Yoshitaka Nakano ◽  
Masashi Konishi ◽  
Yuta Mori ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Damage Characteristics ◽  
Argon Plasmas

Alpha to gamma mode transition in hydrogen capacitive radio-frequency discharge

2013 ◽  
Vol 91 (12) ◽  
pp. 1062-1067 ◽  
Author(s):  
E. Abdel-Fattah ◽  
Omar F. Farag
Keyword(s):  
Radio Frequency ◽  
Vibrational Excitation ◽  
Argon Plasma ◽  
Discharge Voltage ◽  
Distribution Functions ◽  
Low Energy ◽  
Maxwellian Distribution ◽  
Capacitively Coupled ◽  
Argon Plasmas ◽  
Low Energy Electrons

Electron energy distribution functions (EEDFs) were measured with increasing discharge voltages in hydrogen capacitively coupled plasmas by means of radio-frequency compensated Langmuir probe. The results are compared with EEDF in argon plasmas. It was found that, in the hydrogen capacitive discharge, abnormally low-energy electrons became highly populated and the EEDF evolved to a non-Maxwellian distribution as the discharge voltage was increased. This voltage dependence of the EEDF in the hydrogen is contrary to argon capacitively coupled plasma, where at high discharge voltage, low-energy electrons are significantly thermalized due to γ heating and the EEDF evolves to the Maxwellian distribution. The highly populated low-energy electrons at high gas pressure, which was not observed in capacitively coupled argon plasma, show that the γ heating mechanism is somehow inefficient in terms of the molecular gas in capacitive discharges. It appears that this inefficient γ heating seems to be attributed to an efficient vibrational excitation in hydrogen capacitive plasma.

scholarly journals Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

2007 ◽  
Vol 40 (22) ◽  
pp. 7008-7018 ◽  
Author(s):  
J Schulze ◽  
T Gans ◽  
D O'Connell ◽  
U Czarnetzki ◽  
A R Ellingboe ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Plasma Parameters ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

Hydro-carbon material design in a capacitively coupled radio-frequency discharge

2017 ◽  
Vol 15 (3) ◽  
pp. 1700152 ◽  
Author(s):  
Slobodan Mitic ◽  
Stéphane Coussan ◽  
Céline Martin ◽  
Lénaïc Couëdel
Keyword(s):  
Radio Frequency ◽  
Carbon Material ◽  
Material Design ◽  
Capacitively Coupled ◽  
Hydro Carbon ◽  
Radio Frequency Discharge
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