N/sub 2/ gas absorption in cathodic arc apparatus with an Al cathode under medium vacuum

1999 ◽  
Vol 27 (4) ◽  
pp. 1034-1038 ◽  
Author(s):  
H. Takikawa ◽  
N. Kawakami ◽  
T. Sakakibara
2015 ◽  
Vol 53 (7) ◽  
pp. 500-505 ◽  
Author(s):  
Myoung Youp Song ◽  
Young Jun Kwak ◽  
Sung Nam Kwon ◽  
Seong Ho Lee ◽  
Il Woo Park
Keyword(s):  

2018 ◽  
Vol 1 (1) ◽  
pp. 30-34 ◽  
Author(s):  
Alexey Chernogor ◽  
Igor Blinkov ◽  
Alexey Volkhonskiy

The flow, energy distribution and concentrations profiles of Ti ions in cathodic arc are studied by test particle Monte Carlo simulations with considering the mass transfer through the macro-particles filters with inhomogeneous magnetic field. The loss of ions due to their deposition on filter walls was calculated as a function of electric current and number of turns in the coil. The magnetic field concentrator that arises in the bending region of the filters leads to increase the loss of the ions component of cathodic arc. The ions loss up to 80 % of their energy resulted by the paired elastic collisions which correspond to the experimental results. The ion fluxes arriving at the surface of the substrates during planetary rotating of them opposite the evaporators mounted to each other at an angle of 120° characterized by the wide range of mutual overlapping.


2015 ◽  
Vol 25 (1) ◽  
pp. 43-47
Author(s):  
Young Jun Kwak ◽  
Sung Nam Kwon ◽  
Myoung Youp Song
Keyword(s):  

2011 ◽  
Vol 205 (21-22) ◽  
pp. 5116-5123 ◽  
Author(s):  
David Rafaja ◽  
Conrad Polzer ◽  
Gerhard Schreiber ◽  
Peter Polcik ◽  
Martin Kathrein

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