CMOS-compatible silicon nanowire based field-effect pH sensor

2012 ◽  
Author(s):  
Anran Gao ◽  
Pengfei Dai ◽  
Na Lu ◽  
Tie Li ◽  
Yuelin Wang
Keyword(s):  
Field Effect ◽  
Silicon Nanowire ◽  
Ph Sensor ◽  
Cmos Compatible

scholarly journals CMOS-Compatible Silicon Nanowire Field-Effect Transistor Biosensor: Technology Development toward Commercialization

Materials ◽  
2018 ◽  
Vol 11 (5) ◽  
pp. 785 ◽  
Author(s):  
Duy Tran ◽  
Thuy Pham ◽  
Bernhard Wolfrum ◽  
Andreas Offenhäusser ◽  
Benjamin Thierry
Keyword(s):  
Field Effect ◽  
Field Effect Transistor ◽  
Technology Development ◽  
Silicon Nanowire ◽  
Biosensor Technology ◽  
Effect Transistor ◽  
Cmos Compatible

CMOS-compatible fabrication of top-gated field-effect transistor silicon nanowire-based biosensors

2011 ◽  
Vol 21 (6) ◽  
pp. 065008 ◽  
Author(s):  
Patrick Ginet ◽  
Sho Akiyama ◽  
Nobuyuki Takama ◽  
Hiroyuki Fujita ◽  
Beomjoon Kim
Keyword(s):  
Field Effect ◽  
Field Effect Transistor ◽  
Silicon Nanowire ◽  
Effect Transistor ◽  
Cmos Compatible

CMOS-Compatible Silicon Nanowire Field-Effect Transistors for Ultrasensitive and Label-Free MicroRNAs Sensing

Small ◽  
2014 ◽  
Vol 10 (10) ◽  
pp. 2022-2028 ◽  
Author(s):  
Na Lu ◽  
Anran Gao ◽  
Pengfei Dai ◽  
Shiping Song ◽  
Chunhai Fan ◽  
...  
Keyword(s):  
Field Effect ◽  
Field Effect Transistors ◽  
Silicon Nanowire ◽  
Label Free ◽  
Cmos Compatible

Nanowire size dependence on sensitivity of silicon nanowire field-effect transistor-based pH sensor

2017 ◽  
Vol 56 (12) ◽  
pp. 124001 ◽  
Author(s):  
Ryoongbin Lee ◽  
Dae Woong Kwon ◽  
Sihyun Kim ◽  
Sangwan Kim ◽  
Hyun-Sun Mo ◽  
...  
Keyword(s):  
Field Effect ◽  
Field Effect Transistor ◽  
Size Dependence ◽  
Silicon Nanowire ◽  
Ph Sensor ◽  
Effect Transistor

Fabrication and Characterization of Back-Gate Controlled Silicon Nanowire based Field-effect pH Sensor

2019 ◽  
Author(s):  
Wan Amirah Basyarah Z.A. ◽  
M. Nuzaihan M.N. ◽  
M.K. Md Arshad ◽  
M.F.M. Fathil ◽  
Noor Azrina Haji Talik Sisin ◽  
...  
Keyword(s):  
Field Effect ◽  
Silicon Nanowire ◽  
Ph Sensor ◽  
Back Gate ◽  
Fabrication And Characterization

Poly-Silicon Nanowire FET Chemical Sensor

2010 ◽  
Author(s):  
Chih-ting Lin ◽  
Che-wei Huang ◽  
Jui-ching Wang
Keyword(s):  
Silicon Nanowires ◽  
Field Effect ◽  
Field Effect Transistor ◽  
Chemical Sensor ◽  
Silicon Nanowire ◽  
Standard Process ◽  
Dna Virus ◽  
Nano Technology ◽  
Effect Transistor ◽  
Cmos Compatible

Based on the improvements of the fabrication technologies, the dimension of the device has decreased to tens of nanometer. The nano-technology has become intriguing to integrate semiconductor technologies into bio-related applications. As the consequence, silicon nanowires (Si NWs) have been proposed to detect proteins, DNA, virus, and ions etc. However, few of previous studies consider the possibility to merge with CMOS standard process. In this work, we announced CMOS compatible technique which is used to develop polysilicon nanowire field effect transistor (poly-Si NW FET) as a chemical sensor to address this issue.

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