Spatial characterization of wafer state using principal component analysis of optical emission spectra in plasma etch

1997 ◽  
Vol 10 (1) ◽  
pp. 52-61 ◽  
Author(s):  
D.A. White ◽  
D. Boning ◽  
S.W. Butler ◽  
G.G. Barna
Keyword(s):  
Principal Component Analysis ◽  
Emission Spectra ◽  
Principal Component ◽  
Optical Emission ◽  
Component Analysis ◽  
Plasma Etch ◽  
Spatial Characterization ◽  
Optical Emission Spectra

scholarly journals Characterization of the Lateral Distribution of Fluorescent Lipid in Binary-Constituent Lipid Monolayers by Principal Component Analysis

2010 ◽  
Vol 2010 ◽  
pp. 1-9 ◽  
Author(s):  
István P. Sugár ◽  
Xiuhong Zhai ◽  
Ivan A. Boldyrev ◽  
Julian G. Molotkovsky ◽  
Howard L. Brockman ◽  
...  
Keyword(s):  
Principal Component Analysis ◽  
Linear Combination ◽  
Emission Spectra ◽  
Principal Component ◽  
Component Analysis ◽  
Lipid Monolayer ◽  
Lateral Organization ◽  
Binary Constituent ◽  
Fluorescent Lipid

Lipid lateral organization in binary-constituent monolayers consisting of fluorescent and nonfluorescent lipids has been investigated by acquiring multiple emission spectra during measurement of each force-area isotherm. The emission spectra reflect BODIPY-labeled lipid surface concentration and lateral mixing with different nonfluorescent lipid species. Using principal component analysis (PCA) each spectrum could be approximated as the linear combination of only two principal vectors. One point on a plane could be associated with each spectrum, where the coordinates of the point are the coefficients of the linear combination. Points belonging to the same lipid constituents and experimental conditions form a curve on the plane, where each point belongs to a different mole fraction. The location and shape of the curve reflects the lateral organization of the fluorescent lipid mixed with a specific nonfluorescent lipid. The method provides massive data compression that preserves and emphasizes key information pertaining to lipid distribution in different lipid monolayer phases. Collectively, the capacity of PCA for handling large spectral data sets, the nanoscale resolution afforded by the fluorescence signal, and the inherent versatility of monolayers for characterization of lipid lateral interactions enable significantly enhanced resolution of lipid lateral organizational changes induced by different lipid compositions.

Characterization of fretting wear experiments on spline couplings by principal component analysis

2016 ◽  
Vol 231 (7) ◽  
pp. 860-868 ◽  
Author(s):  
Waqar Qureshi ◽  
Francesca Cura ◽  
Andrea Mura
Keyword(s):  
Experimental Data ◽  
Principal Component Analysis ◽  
Principal Component ◽  
Component Analysis ◽  
Fretting Wear ◽  
Aircraft Industry ◽  
Surface Movement ◽  
Noisy Measurements ◽  
Quasi Static Process

Fretting wear is a quasi-static process in which repeated relative surface movement of components results in wear and fatigue. Fretting wear is quite significant in the case of spline couplings which are frequently used in the aircraft industry to transfer torque and power. Fretting wear depends on materials, pressure distribution, torque, rotational speeds, lubrication, surface finish, misalignment between spline shafts, etc. The presence of so many factors makes it difficult to conduct experiments for better models of fretting wear and it is the case whenever a mathematical model is sought from experimental data which is prone to noisy measurements, outliers and redundant variables. This work develops a principal component analysis based method, using a criterion which is insensitive to outliers, to realize a better design and interpret experiments on fretting wear. The proposed method can be extended to other cases too.

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