scholarly journals Transient Process Optimization for Dual-Arm Cluster Tools With Wafer Revisiting

IEEE Access ◽  
2021 ◽  
pp. 1-1
Author(s):  
Jipeng Wang ◽  
Hesuan Hu ◽  
Chunrong Pan ◽  
Liang Li
Keyword(s):  
Process Optimization ◽  
Transient Process ◽  
Cluster Tools ◽  
Dual Arm

scholarly journals A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting

2013 ◽  
Vol 43 (5) ◽  
pp. 1182-1194 ◽  
Author(s):  
NaiQi Wu ◽  
MengChu Zhou ◽  
Feng Chu ◽  
Chengbin Chu
Keyword(s):  
Petri Net ◽  
Scheduling Strategy ◽  
Cluster Tools ◽  
Dual Arm
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