Development and Characterization of High Temperature Plasma Nitridation Process for Advanced CMOS Technology Application

2021 ◽  
Author(s):  
Xiaoxu Kang ◽  
Xiaolan Zhong ◽  
Zhangfa Chen ◽  
Zhengkai Dao ◽  
Qiang Zhang ◽  
...  
Keyword(s):  
High Temperature ◽  
Cmos Technology ◽  
Temperature Plasma ◽  
Technology Application ◽  
Plasma Nitridation ◽  
High Temperature Plasma ◽  
Nitridation Process

scholarly journals Spectroscopic characterization of composite lithium materials irradiated with high-temperature plasma

Heliyon ◽  
2020 ◽  
Vol 6 (11) ◽  
pp. e05510
Author(s):  
V.P. Budaev ◽  
S.D. Fedorovich ◽  
A.V. Lubenchenko ◽  
A.V. Karpov ◽  
N.E. Belova ◽  
...  
Keyword(s):  
High Temperature ◽  
Spectroscopic Characterization ◽  
Temperature Plasma ◽  
High Temperature Plasma

Application of Laser Resonance Scattering to the Study of High-temperature Plasma-wall Interaction

1981 ◽  
Vol 9 (3) ◽  
pp. 237-252 ◽  
Author(s):  
Mitsuo MAEDA ◽  
Katsunori MURAOKA ◽  
Makoto HAMAMOTO ◽  
Masanori AKAZAKI ◽  
Yasushi MIYAZOE
Keyword(s):  
High Temperature ◽  
Resonance Scattering ◽  
Temperature Plasma ◽  
Laser Resonance ◽  
High Temperature Plasma ◽  
Wall Interaction

scholarly journals On Two Mechanisms of X-Ray Generation in Comets

1985 ◽  
Vol 85 ◽  
pp. 365-368
Author(s):  
S. Ibadov
Keyword(s):  
High Temperature ◽  
Interplanetary Dust ◽  
Dust Particles ◽  
Interplanetary Dust Particles ◽  
Temperature Plasma ◽  
X Ray ◽  
Plasma Generation ◽  
High Temperature Plasma

AbstractThe intensity of solar X-radiation scattered by a comet is calculated and compared to the proper X-radiation of the comet due to impacts of cometary and interplanetary dust particles. Detection of X-radiation of dusty comets at small heliocentric distances (R ≤ 1 a.u.) is found to be an indicator of high-temperature plasma generation as result of grain collisions.

Space‐ and time‐resolving spectrograph for high‐temperature plasma diagnostics

1986 ◽  
Vol 57 (8) ◽  
pp. 2041-2042 ◽  
Author(s):  
D. Content ◽  
D. Wróblewski ◽  
M. Perry ◽  
H. W. Moos
Keyword(s):  
High Temperature ◽  
Plasma Diagnostics ◽  
Temperature Plasma ◽  
Space And Time ◽  
High Temperature Plasma
Sign in / Sign up

Export Citation Format

Share Document