A Novel Advanced Process Control for Semiconductor Manufacturing: Dual Proximate Inverse System Feedback Control

Author(s):  
Sheng Hua ◽  
Xiu-Lan Cheng ◽  
Tong-Dan Jin
2011 ◽  
Vol 314-316 ◽  
pp. 2504-2511 ◽  
Author(s):  
An Chen Lee ◽  
Tzu Wei Kuo ◽  
Zeng Lien Lee

Advanced process control (APC) has been recognized as a proper tool for maximizing profitability of semiconductor manufacturing facilities by improving efficiency and product quality. Run-to-run (RtR) process control with good quality and reliable performance for APC applications are most applicable. Chemical mechanical planarization (CMP) is part of critical processing module in semiconductor manufacturing. This paper proposes a new RtR control scheme, modified double EWMA controller (m-dEWMA), which is adaptive to the mixed product CMP processes. The m-dEWMA controller combined thread dEWMA with the drift compensation scheme to deal with the drift and shift disturbances caused by tool and products, respectively. Comparing recently mixed product control schemes: threaded EWMA controller, JADE control and threaded prediction correction controller (threaded PCC), the simulation results show that the m-dEWMA has better control performance than other controllers. The experiment results revealed that the m-dEWMA controller improves the wafer uniformity significantly in mixed product CMP process.


2005 ◽  
Vol 14 (5) ◽  
pp. 096369350501400 ◽  
Author(s):  
Eric Lafranche ◽  
Laura Cilleruelo ◽  
Marc Ryckebusch ◽  
Patricia Krawczak

The formulation of unsaturated polyester Bulk Moulding Compounds (BMC) or Continuously Impregnated Compounds (CIC) induces a variation of their reactivity or viscosity, which reflects the heterogeneity of the material batches produced. This experimental study has pointed out the benefits brought by an advanced process control of the injection moulding holding stage (feedback control on the polymer pressure in the mould cavity with automatic set up of holding time) compared to a regular process control (feedback control on the hydraulic pressure). The advanced process control actually leads to the reduction of the scattering observed on bulk (weight, specific gravity), surface (porosity, roughness) or mechanical properties (Charpy impact strength). It allows smoothing the thermal perturbations induced by a manufacturing start-up, as well as the rheological perturbation due to the material batches heterogeneity that are frequently encountered in the unsaturated polyester compound injection moulding industry. This scattering decrease, centred on the mean value of the target properties, directly involves significant quality and productivity improvement.


2014 ◽  
Vol 18 (2) ◽  
pp. 195-205 ◽  
Author(s):  
Claude Yugma ◽  
Jakey Blue ◽  
Stéphane Dauzère-Pérès ◽  
Ali Obeid

Sign in / Sign up

Export Citation Format

Share Document