Virtual metrology for TSV etch depth measurement using optical emission spectroscopy

Author(s):  
Ja Myung Gu ◽  
Sang Jeen Hong
2021 ◽  
Author(s):  
Jenna M. DeSousa ◽  
Micaella Z. Jorge ◽  
Hayley B. Lindsay ◽  
Frederick R. Haselton ◽  
David W. Wright ◽  
...  

This work demonstrates the first use of ICP-OES to quantitatively analyze gold content on lateral flow assays.


Author(s):  
Masahiro Shiga ◽  
Haruki Omine ◽  
Masaki Kitsunezuka ◽  
Hironori Moki ◽  
Yuki Kataoka ◽  
...  

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