A new process for liquid phase deposition of silicon oxide and its application in amorphous silicon thin film transisitor

Mapping Intimacies ◽

10.1109/edms.1994.863882 ◽

2005 ◽

Author(s):

Jenq-Shiuh Chou ◽

Maw-Song Chen ◽

Si-Chen Lee

Keyword(s):

Thin Film ◽

Liquid Phase ◽

Amorphous Silicon ◽

Silicon Oxide ◽

Liquid Phase Deposition ◽

Silicon Thin Film ◽

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Amorphous-silicon thin-film transistor with liquid phase deposition of silicon dioxide gate insulator

IEEE Electron Device Letters ◽

10.1109/55.748913 ◽

1999 ◽

Vol 20 (3) ◽

pp. 138-139 ◽

Author(s):

Jiun-Lin Yeh ◽

Si-Chen Lee

Keyword(s):

Thin Film ◽

Liquid Phase ◽

Silicon Dioxide ◽

Amorphous Silicon ◽

Thin Film Transistor ◽

Gate Insulator ◽

Liquid Phase Deposition ◽

Silicon Thin Film

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Planarization of amorphous silicon thin film transistors by liquid phase deposition of silicon dioxide

IEEE Transactions on Electron Devices ◽

10.1109/16.469397 ◽

1995 ◽

Vol 42 (11) ◽

pp. 1918-1923 ◽

Author(s):

Maw-Song Chen ◽

Jenq-Shiuh Chou ◽

Si-Chen Lee

Keyword(s):

Thin Film ◽

Liquid Phase ◽

Silicon Dioxide ◽

Amorphous Silicon ◽

Thin Film Transistors ◽

Liquid Phase Deposition ◽

Silicon Thin Film

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N-type hydrogenated amorphous silicon oxide containing a microcrystalline silicon phase as an intermediate reflector in silicon thin film solar cells

physica status solidi (c) ◽

10.1002/pssc.200982872 ◽

2010 ◽

pp. NA-NA ◽

Author(s):

Thomas Grundler ◽

Andreas Lambertz ◽

Friedhelm Finger

Keyword(s):

Thin Film ◽

Amorphous Silicon ◽

Silicon Oxide ◽

Hydrogenated Amorphous Silicon ◽

Thin Film Solar Cells ◽

Microcrystalline Silicon ◽

Silicon Thin Film ◽

Silicon Phase ◽

Amorphous Silicon Oxide ◽

Hydrogenated Amorphous

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Amorphous silicon thin-film transistor with fluorinated silicon oxide ion stopper

IEEE Electron Device Letters ◽

10.1109/55.843157 ◽

2000 ◽

Vol 21 (6) ◽

pp. 301-303 ◽

Author(s):

Kyung Wook Kim ◽

Kyu Sik Cho ◽

Jai Il Ryu ◽

Keon Ho Yoo ◽

Jin Jang

Keyword(s):

Thin Film ◽

Amorphous Silicon ◽

Silicon Oxide ◽

Thin Film Transistor ◽

Silicon Thin Film ◽

Fluorinated Silicon Oxide ◽

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Improved photovoltaic properties of amorphous silicon thin-film solar cells with an un-doped silicon oxide layer

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2014.11.042 ◽

2015 ◽

Vol 31 ◽

pp. 184-188 ◽

Author(s):

Yu-Hung Chen ◽

Yung-Tsung Liu ◽

Chien-Fu Huang ◽

Jun-Chin Liu ◽

Chen-Cheng Lin

Keyword(s):

Thin Film ◽

Solar Cells ◽

Amorphous Silicon ◽

Oxide Layer ◽

Silicon Oxide ◽

Thin Film Solar Cells ◽

Silicon Thin Film ◽

Photovoltaic Properties ◽

Silicon Oxide Layer ◽

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A Novel Hydrogen-reduced P-type Amorphous Silicon Oxide Buffer Layer for Highly Efficient Amorphous Silicon Thin Film Solar Cells

The Transactions of The Korean Institute of Electrical Engineers ◽

10.5370/kiee.2016.65.10.1702 ◽

2016 ◽

Vol 65 (10) ◽

pp. 1702-1705

Author(s):

Dong-Won Kang

Keyword(s):

Thin Film ◽

Solar Cells ◽

Amorphous Silicon ◽

Buffer Layer ◽

Silicon Oxide ◽

Thin Film Solar Cells ◽

Silicon Thin Film ◽

Highly Efficient ◽

Amorphous Silicon Oxide ◽

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Application of liquid phase deposited silicon dioxide to metal-oxide-semiconductor capacitor and amorphous silicon thin-film transistor

IEEE Transactions on Electron Devices ◽

10.1109/16.485542 ◽

1996 ◽

Vol 43 (4) ◽

pp. 599-604 ◽

Author(s):

Jenq-Shiuh Chou ◽

Si-Chen Lee

Keyword(s):

Thin Film ◽

Liquid Phase ◽

Metal Oxide ◽

Silicon Dioxide ◽

Amorphous Silicon ◽

Thin Film Transistor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Silicon Thin Film ◽

Metal Oxide Semiconductor Capacitor

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Characteristics of self-induced lightly-doped-drain polycrystalline silicon thin film transistors with liquid-phase deposition SiO/sub 2/ as gate-insulator and passivation-layer

IEEE Transactions on Electron Devices ◽

10.1109/16.370064 ◽

1995 ◽

Vol 42 (2) ◽

pp. 307-314 ◽

Author(s):

Ching-Fa Yeh ◽

Tzung-Zu Yang ◽

Tai-Ju Chen

Keyword(s):

Thin Film ◽

Liquid Phase ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Passivation Layer ◽

Gate Insulator ◽

Liquid Phase Deposition ◽

Silicon Thin Film ◽

Lightly Doped Drain

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Hydrogen dilution on an undoped silicon oxide layer and Its application to amorphous silicon thin-film solar cells

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2015.09.024 ◽

2016 ◽

Vol 41 ◽

pp. 312-316 ◽

Author(s):

Yu-Hung Chen ◽

Chen-Cheng Lin ◽

Yung-Tsung Liu ◽

Hsin-Wei Lu ◽

Jun-Chin Liu

Keyword(s):

Thin Film ◽

Solar Cells ◽

Amorphous Silicon ◽

Oxide Layer ◽

Silicon Oxide ◽

Thin Film Solar Cells ◽

Silicon Thin Film ◽

Silicon Oxide Layer ◽

Hydrogen Dilution

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The Instability Characteristics of Amorphous Silicon Thin Film Transistors with Various Interfacial and Bulk Defect States

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.6226 ◽

1997 ◽

Vol 36 (Part 1, No. 10) ◽

pp. 6226-6229 ◽

Author(s):

Huang-Chung Cheng ◽

Jun-Wei Tsai ◽

Chun-Yao Huang ◽

Fang-Chen Luo ◽

Hsing-Chien Tuan

Keyword(s):

Thin Film ◽

Amorphous Silicon ◽

Thin Film Transistors ◽

Defect States ◽

Silicon Thin Film

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