Characteristics of self-induced lightly-doped-drain polycrystalline silicon thin film transistors with liquid-phase deposition SiO/sub 2/ as gate-insulator and passivation-layer

1995 ◽  
Vol 42 (2) ◽  
pp. 307-314 ◽  
Author(s):  
Ching-Fa Yeh ◽  
Tzung-Zu Yang ◽  
Tai-Ju Chen
Keyword(s):  
Thin Film ◽  
Liquid Phase ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Passivation Layer ◽  
Gate Insulator ◽  
Liquid Phase Deposition ◽  
Silicon Thin Film ◽  
Lightly Doped Drain

Electrical Enhancement of Polycrystalline Silicon Thin-Film Transistors Using Fluorinated Silicate Glass Passivation Layer

2008 ◽  
Vol 47 (2) ◽  
pp. 847-852 ◽  
Author(s):  
Chia-Wen Chang ◽  
Chih-Kang Deng ◽  
Jiun-Jia Huang ◽  
Tong-Yi Wang ◽  
Tan-Fu Lei
Keyword(s):  
Thin Film ◽  
Silicate Glass ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Passivation Layer ◽  
Silicon Thin Film

Low-frequency noise in gate overlapped lightly doped drain polycrystalline silicon thin-film transistors

2000 ◽  
Vol 76 (22) ◽  
pp. 3268-3270 ◽  
Author(s):  
S. Giovannini ◽  
A. Bove ◽  
A. Valletta ◽  
L. Mariucci ◽  
A. Pecora ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Low Frequency ◽  
Frequency Noise ◽  
Low Frequency Noise ◽  
Silicon Thin Film ◽  
Lightly Doped Drain

A Novel Fabrication Method for Polycrystalline Silicon Thin-Film Transistors with a Self-Aligned Lightly Doped Drain Structure

1993 ◽  
Vol 32 (Part 1, No. 1B) ◽  
pp. 469-473 ◽  
Author(s):  
Kazuhiro Kobayashi ◽  
Hiroyuki Murai ◽  
Takao Sakamoto ◽  
Kris Baert ◽  
Hidetada Tokioka ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Fabrication Method ◽  
Silicon Thin Film ◽  
Lightly Doped Drain
Sign in / Sign up

Export Citation Format

Share Document