A micromachined sensor array using thin film resonators

Author(s):  
J. Xia ◽  
S. Burns ◽  
M. Porter ◽  
T. Xue ◽  
G. Liu ◽  
...  
2011 ◽  
Vol 9 (2) ◽  
pp. 34-39 ◽  
Author(s):  
Chul-Hee Ahn ◽  
Hyoung-Hoon Kim ◽  
Sang-Hu Park ◽  
Chang-Min Son ◽  
Jeung-Sang Go

2000 ◽  
Vol 39 (Part 1, No. 5B) ◽  
pp. 3049-3053 ◽  
Author(s):  
Hirofumi Kanbara ◽  
Hideaki Kobayashi ◽  
Kiyoshi Nakamura

2004 ◽  
Vol 103 (1-2) ◽  
pp. 98-103 ◽  
Author(s):  
J.P. Santos ◽  
J. Lozano ◽  
M. Aleixandre ◽  
I. Sayago ◽  
M.J. Fernández ◽  
...  

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