A micromachined sensor array using thin film resonators
2011 ◽
Vol 9
(2)
◽
pp. 34-39
◽
Keyword(s):
1999 ◽
Vol 146
(2)
◽
pp. 691-696
◽
Keyword(s):
2000 ◽
Vol 39
(Part 1, No. 5B)
◽
pp. 3049-3053
◽
2005 ◽
Vol 52
(4)
◽
pp. 604-609
◽
Keyword(s):
2004 ◽
Vol 103
(1-2)
◽
pp. 98-103
◽