Low‐Temperature Deposition of Highly Textured Aluminum Nitride by Direct Current Magnetron Sputtering for Applications in Thin‐Film Resonators

1999 ◽  
Vol 146 (2) ◽  
pp. 691-696 ◽  
Author(s):  
R. S. Naik ◽  
R. Reif ◽  
J. J. Lutsky ◽  
C. G. Sodini
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Aluminum Nitride ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Low Temperature Deposition ◽  
Direct Current Magnetron Sputtering ◽  
Temperature Deposition ◽  
Thin Film Resonators

ZrCuAlNi thin film metallic glass grown by high power impulse and direct current magnetron sputtering

2021 ◽  
pp. 127029
Author(s):  
Niklas Bönninghoff ◽  
Wahyu Diyatmika ◽  
Jinn P. Chu ◽  
Stanislav Mráz ◽  
Jochen M. Schneider ◽  
...  
Keyword(s):  
Thin Film ◽  
Metallic Glass ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
High Power ◽  
Direct Current Magnetron Sputtering

Optical properties of aluminum nitride thin films grown by direct-current magnetron sputtering close to epitaxy

2013 ◽  
Vol 534 ◽  
pp. 442-445 ◽  
Author(s):  
A. Stolz ◽  
A. Soltani ◽  
B. Abdallah ◽  
J. Charrier ◽  
D. Deresmes ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Aluminum Nitride ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Direct Current Magnetron Sputtering

Technique for High-Rate, Low-Temperature Deposition of TiO2Photocatalytic Thin Film Using Radical-Assisted Sputtering

2011 ◽  
Vol 50 (1R) ◽  
pp. 010204 ◽  
Author(s):  
Daisuke Noguchi ◽  
Tomohiro Eto ◽  
Kazuya Kodama ◽  
Yukie Higashimaru ◽  
Shoji Fukudome ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
High Rate ◽  
Low Temperature Deposition ◽  
Temperature Deposition

The mechanism of low temperature deposition of crystalline anatase by reactive DC magnetron sputtering

2005 ◽  
Vol 190 (2-3) ◽  
pp. 321-330 ◽  
Author(s):  
Mark C. Barnes ◽  
Sunil Kumar ◽  
Len Green ◽  
Nong-Moon Hwang ◽  
Andrea R. Gerson
Keyword(s):  
Low Temperature ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Low Temperature Deposition ◽  
Temperature Deposition
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