Fabrication and characterization of 1.5fF/um/sup 2/ high-performance low-cost metal-insulator-metal capacitor in 0.13um and below Cu 4 BEOL technologies

Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. ◽

10.1109/icsict.2004.1434987 ◽

2005 ◽

Author(s):

Z. Chen ◽

K.M. Lin ◽

C.C. Kuo ◽

Y.F. Lin ◽

J.C. Huang ◽

...

Keyword(s):

High Performance ◽

Low Cost ◽

Metal Insulator ◽

Metal Insulator Metal ◽

Fabrication And Characterization

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Fabrication and Characterization of ZnO Langmuir–Blodgett Film and Its Use in Metal–Insulator–Metal Tunnel Diode

Langmuir ◽

10.1021/acs.langmuir.6b02182 ◽

2016 ◽

Vol 32 (33) ◽

pp. 8307-8314 ◽

Author(s):

Ibrahim Azad ◽

Manoj K. Ram ◽

D. Yogi Goswami ◽

Elias Stefanakos

Keyword(s):

Tunnel Diode ◽

Metal Insulator ◽

Blodgett Film ◽

Langmuir Blodgett ◽

Metal Insulator Metal ◽

Langmuir Blodgett Film ◽

Fabrication And Characterization

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Structural and Electrical Characterization of Lu2O3Dielectric Layer for High Performance Analog Metal–Insulator–Metal Capacitors

Journal of The Electrochemical Society ◽

10.1149/2.086206jes ◽

2012 ◽

Vol 159 (6) ◽

pp. H589-H594 ◽

Author(s):

Somnath Mondal ◽

Jim-Long Her ◽

Shao-Ju Shih ◽

Tung-Ming Pan

Keyword(s):

High Performance ◽

Electrical Characterization ◽

Metal Insulator ◽

Metal Insulator Metal

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Modeling, Fabrication, and Characterization of Low-Cost and High-Performance Polycrystalline Panel-Based Silicon Interposer With Through Vias and Redistribution Layers

IEEE Transactions on Components Packaging and Manufacturing Technology ◽

10.1109/tcpmt.2014.2364535 ◽

2014 ◽

Vol 4 (12) ◽

pp. 2035-2041 ◽

Author(s):

Qiao Chen ◽

Yuya Suzuki ◽

Gokul Kumar ◽

Venky Sundaram ◽

Rao R. Tummala

Keyword(s):

High Performance ◽

Low Cost ◽

Fabrication And Characterization

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Fabrication and characterization of chromium-chromium oxide-chromium metal-insulator-metal (MIM) tunnel junctions

The European Physical Journal Applied Physics ◽

10.1051/epjap/2014130489 ◽

2014 ◽

Vol 68 (3) ◽

pp. 30302 ◽

Author(s):

Nacer Debbar ◽

Mohamed Syaryadhi ◽

Mohamed Abdel-Rahman

Keyword(s):

Chromium Oxide ◽

Tunnel Junctions ◽

Metal Insulator ◽

Metal Insulator Metal ◽

Fabrication And Characterization

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NanoCube: A Low-Cost, Modular, and High-Performance Embedded System for Adaptive Fabrication and Characterization of Nanogaps

IEEE Transactions on Nanotechnology ◽

10.1109/tnano.2014.2302584 ◽

2014 ◽

Vol 13 (2) ◽

pp. 322-334 ◽

Author(s):

Paolo Motto ◽

Marco Crepaldi ◽

Gianluca Piccinini ◽

Danilo Demarchi

Keyword(s):

Embedded System ◽

High Performance ◽

Low Cost ◽

Fabrication And Characterization

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Fabrication and characterization of NiO based metal−insulator−metal diode using Langmuir-Blodgett method for high frequency rectification

AIP Advances ◽

10.1063/1.5034455 ◽

2018 ◽

Vol 8 (4) ◽

pp. 045219 ◽

Author(s):

Ibrahim Azad ◽

Manoj K. Ram ◽

D. Yogi Goswami ◽

Elias Stefanakos

Keyword(s):

High Frequency ◽

Metal Insulator ◽

Langmuir Blodgett ◽

Metal Insulator Metal ◽

Fabrication And Characterization ◽

Frequency Rectification

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Fabrication and characterization of Al/PMMA/Cr metal-insulator-metal diode

2017 Devices for Integrated Circuit (DevIC) ◽

10.1109/devic.2017.8073897 ◽

2017 ◽

Author(s):

Shilpi ◽

Kapil Bhatt ◽

Sandeep Kumar ◽

Sandeep ◽

C.C. Tripathi

Keyword(s):

Metal Insulator ◽

Metal Insulator Metal ◽

Fabrication And Characterization

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Fabrication and characterization of buried-gate fin and recess channel MOSFET for high performance and low GIDL current

2009 International Semiconductor Device Research Symposium ◽

10.1109/isdrs.2009.5378069 ◽

2009 ◽

Author(s):

Jae Young Song ◽

Jong Pil Kim ◽

Sang Wan Kim ◽

Jeong-Hoon Oh ◽

Kyung-Chang Ryoo ◽

...

Keyword(s):

High Performance ◽

Fabrication And Characterization

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Fabrication and characterization of high-performance Mo-doped TiN coatings

Vacuum ◽

10.1016/j.vacuum.2021.110311 ◽

2021 ◽

pp. 110311

Author(s):

Shenghao Zhou ◽

Weichen Zhao ◽

Yaosha Wu ◽

Zhaoguo Qiu ◽

Songsheng Lin ◽

...

Keyword(s):

High Performance ◽

Tin Coatings ◽

Fabrication And Characterization

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Fabrication and characterization of high-performance planar InGaAs/InP separate absorption, grading and multiplication avalanche photodetectors

Solid-State Electronics ◽

10.1016/s0038-1101(98)00302-5 ◽

1999 ◽

Vol 43 (3) ◽

pp. 659-663 ◽

Author(s):

Wen-Jeng Ho ◽

Meng-Chyi Wu ◽

Yuan-Kuang Tu

Keyword(s):

High Performance ◽

Avalanche Photodetectors ◽

Fabrication And Characterization

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