New Excimer Laser Annealing Process for Single-Crystal 3-D Stacked Thin-Film Transistors

2006 ◽  
Author(s):  
W. Xianyu ◽  
Huaxiang Yin ◽  
H.S. Cho ◽  
Xiaoxin Zhang ◽  
T. Noguchi
Keyword(s):  
Thin Film ◽  
Single Crystal ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Laser Annealing ◽  
Annealing Process ◽  
Excimer Laser Annealing

Poly-Silicon Thin-Film Transistors with Uniform Performance Fabricated by Excimer Laser Annealing

1993 ◽  
Vol 32 (Part 1, No. 1B) ◽  
pp. 474-481 ◽  
Author(s):  
Ichirou Asai ◽  
Noriji Kato ◽  
Mario Fuse ◽  
Toshihisa Hamano
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Laser Annealing ◽  
Silicon Thin Film ◽  
Excimer Laser Annealing ◽  
Poly Silicon

Comprehensive Study of Lateral Grain Growth in Poly-Si Films by Excimer Laser Annealing and Its Application to Thin Film Transistors

1994 ◽  
Vol 33 (Part 1, No. 10) ◽  
pp. 5657-5662 ◽  
Author(s):  
Hiroyuki Kuriyama ◽  
Tomoyuki Nohda ◽  
Yoichirou Aya ◽  
Takashi Kuwahara ◽  
Kenichiro Wakisaka ◽  
...  
Keyword(s):  
Thin Film ◽  
Grain Growth ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Si Films ◽  
Comprehensive Study
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