Discontinuous Innovation: Strained Silicon Technology

2006 ◽  
Author(s):  
G.L. Patton
Keyword(s):  
Strained Silicon ◽  
Silicon Technology ◽  
Discontinuous Innovation

Local Bonding Structure of High-Stress Silicon Nitride Film Modified by UV Curing for Strained Silicon Technology beyond 45 nm Node SoC Devices

2007 ◽  
Vol 46 (4B) ◽  
pp. 1984-1988 ◽  
Author(s):  
Yoshihiro Miyagawa ◽  
Tatsunori Murata ◽  
Yukio Nishida ◽  
Takehiro Nakai ◽  
Akira Uedono ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
High Stress ◽  
Uv Curing ◽  
Strained Silicon ◽  
Nitride Film ◽  
Silicon Nitride Film ◽  
Silicon Technology ◽  
Bonding Structure ◽  
Local Bonding

Strained silicon technology

2006 ◽  
Author(s):  
A. O'Neill ◽  
S. Olsen ◽  
E. Escobedo-Cousin ◽  
J. Varzgar ◽  
R. Agaiby ◽  
...  
Keyword(s):  
Strained Silicon ◽  
Silicon Technology
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