Phase defect detection algorithm for extreme ultraviolet mask blank based on watershed edge detection

Author(s):  
Yiwen Ji ◽  
Xiaobin Wu ◽  
Xiaoquan Han ◽  
Wanlu Xie ◽  
Xiangyu Ma
2021 ◽  
Vol 9 ◽  
Author(s):  
Yifeng Zhang ◽  
Zhiwen Wang ◽  
Yuhang Wang ◽  
Canlong Zhang ◽  
Biao Zhao

The silicon panel is the core component of photovoltaic power generation, whose surface quality is related to its service life and power generation efficiency. However, microcracks, fragments, incomplete welding, broken grids, and other defects often occur in industrial production. The edge detection algorithm is usually used to detect defects in silicon panels, but the common edge detection algorithm has an impact on defect detection because of the grid shadow of the panel. The current mainstream defect detection algorithm based on convolutional neural network requires a large number of positive and negative samples of image data sets for pretraining the model, which consumes a lot of time and GPU computing power, and the steps are cumbersome. To solve the problem, a defect detection method based on Prewitt and Canny operators is proposed in this article. In this method, Prewitt and Canny operators are combined to eliminate the effect of grids on the detection. The microcrack defects and their specific positions can be detected efficiently and intuitively, therefore improving the detection accuracy. The experimental results indicate that the purity and integrity of the defect profile of the image processed by the algorithm are greatly improved. The foreground edge is clear, and the defect recognition accuracy is higher, which effectively prevent the impact of grid shadow on weld testing.


2021 ◽  
Vol 336 ◽  
pp. 01009
Author(s):  
Yilu Zhou ◽  
Xiaojin Fu

There are many aspects in the defect detection system. Any deviation in any link will affect the accuracy of the final detection, and edge detection is very important in the image preprocessing stage. In this paper, a new edge detection algorithm is proposed. Firstly, the improved Sobel operator is used to detect the image contour, and then the position of the contour is taken as the initial position of ant colony algorithm. The experimental results show that the algorithm can extract the contour with uniform thickness and length from the original image collected by the industrial camera, and the running time of the algorithm is almost the same as that of the traditional ant colony algorithm, thus providing more accurate data for the defect detection of products in the later stage.


2021 ◽  
pp. 1-18
Author(s):  
Hui Liu ◽  
Boxia He ◽  
Yong He ◽  
Xiaotian Tao

The existing seal ring surface defect detection methods for aerospace applications have the problems of low detection efficiency, strong specificity, large fine-grained classification errors, and unstable detection results. Considering these problems, a fine-grained seal ring surface defect detection algorithm for aerospace applications is proposed. Based on analysis of the stacking process of standard convolution, heat maps of original pixels in the receptive field participating in the convolution operation are quantified and generated. According to the generated heat map, the feature extraction optimization method of convolution combinations with different dilation rates is proposed, and an efficient convolution feature extraction network containing three kinds of dilated convolutions is designed. Combined with the O-ring surface defect features, a multiscale defect detection network is designed. Before the head of multiscale classification and position regression, feature fusion tree modules are added to ensure the reuse and compression of the responsive features of different receptive fields on the same scale feature maps. Experimental results show that on the O-rings-3000 testing dataset, the mean condition accuracy of the proposed algorithm reaches 95.10% for 5 types of surface defects of aerospace O-rings. Compared with RefineDet, the mean condition accuracy of the proposed algorithm is only reduced by 1.79%, while the parameters and FLOPs are reduced by 35.29% and 64.90%, respectively. Moreover, the proposed algorithm has good adaptability to image blur and light changes caused by the cutting of imaging hardware, thus saving the cost.


Electronics ◽  
2021 ◽  
Vol 10 (14) ◽  
pp. 1665
Author(s):  
Jakub Suder ◽  
Kacper Podbucki ◽  
Tomasz Marciniak ◽  
Adam Dąbrowski

The aim of the paper was to analyze effective solutions for accurate lane detection on the roads. We focused on effective detection of airport runways and taxiways in order to drive a light-measurement trailer correctly. Three techniques for video-based line extracting were used for specific detection of environment conditions: (i) line detection using edge detection, Scharr mask and Hough transform, (ii) finding the optimal path using the hyperbola fitting line detection algorithm based on edge detection and (iii) detection of horizontal markings using image segmentation in the HSV color space. The developed solutions were tuned and tested with the use of embedded devices such as Raspberry Pi 4B or NVIDIA Jetson Nano.


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