Recent advance in single-ion implantation method for single-dopant devices
2018 ◽
Vol 28
(3)
◽
pp. 847-853
◽
Keyword(s):
2005 ◽
Vol 44
(No. 43)
◽
pp. L1316-L1319
◽
1998 ◽
Vol 54
(1-3)
◽
pp. 301-304
◽