Damage control with cluster ion implantation

2013 13th International Workshop on Junction Technology (IWJT) ◽

10.1109/iwjt.2013.6644497 ◽

2013 ◽

Author(s):

Shigeki Sakai ◽

Nariaki Hamamoto ◽

Yoshiki Nakashima ◽

Hiroshi Onoda

Keyword(s):

Ion Implantation ◽

Damage Control ◽

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Low Temperature Graphene Film Formation with Ethane Cluster Ion Implantation

2016 21st International Conference on Ion Implantation Technology (IIT) ◽

10.1109/iit.2016.7882889 ◽

2016 ◽

Author(s):

Noriaki Toyoda ◽

Isao Yamada

Keyword(s):

Low Temperature ◽

Ion Implantation ◽

Film Formation ◽

Graphene Film ◽

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Cluster Ion Implantation for Process Application -Carbon Cluster co-Implantation-

10.1063/1.3548322 ◽

2011 ◽

Author(s):

M. Tanjyo ◽

T. Nagayama ◽

H. Onoda ◽

N. Hamamoto ◽

S. Umisedo ◽

...

Keyword(s):

Ion Implantation ◽

Carbon Cluster ◽

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Defect characteristics by boron cluster ion implantation

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(03)00878-4 ◽

2003 ◽

Vol 206 ◽

pp. 855-860 ◽

Author(s):

Takaaki Aoki ◽

Jiro Matsuo ◽

Gikan Takaoka ◽

Noriaki Toyoda ◽

Isao Yamada

Keyword(s):

Ion Implantation ◽

Boron Cluster ◽

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Parasitic resistance and leakage reduction by raised source / drain extention fabricated with cluster ion implantation and millisecond annealing

2008 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors ◽

10.1109/rtp.2008.4690561 ◽

2008 ◽

Author(s):

Koichi Yako ◽

Toyoji Yamamoto ◽

Kazuya Uejima ◽

Takeo Ikezawa ◽

Masami Hane

Keyword(s):

Ion Implantation ◽

Leakage Reduction ◽

Parasitic Resistance ◽

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Molecular dynamics simulations of cluster ion implantation for shallow junction formation

10.1063/1.1395465 ◽

2001 ◽

Author(s):

Takaaki Aoki

Keyword(s):

Molecular Dynamics ◽

Ion Implantation ◽

Molecular Dynamics Simulations ◽

Shallow Junction ◽

Junction Formation ◽

Cluster Ion ◽

Dynamics Simulations

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Shallow junction formation by polyatomic cluster ion implantation

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(96)00451-x ◽

1997 ◽

Vol 121 (1-4) ◽

pp. 345-348 ◽

Author(s):

D. Takeuchi ◽

N. Shimada ◽

J. Matsuo ◽

I. Yamada

Keyword(s):

Ion Implantation ◽

Shallow Junction ◽

Junction Formation ◽

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Vacancy-Type Defects Introduced by Gas Cluster Ion-Implantation on Si Studied by Monoenergetic Positron Beams

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.111801 ◽

2012 ◽

Vol 51 (11R) ◽

pp. 111801 ◽

Author(s):

Akira Uedono ◽

Tsuyoshi Moriya ◽

Takuro Tsutsui ◽

Shogo Kimura ◽

Nagayasu Oshima ◽

...

Keyword(s):

Ion Implantation ◽

Cluster Ion ◽

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Cluster Ion Implantation - Prospects and Challenges-

2007 International Workshop on Junction Technology ◽

10.1109/iwjt.2007.4279945 ◽

2007 ◽

Author(s):

Jiro Matsuo ◽

Takaaki Aoki ◽

Toshio Seki

Keyword(s):

Ion Implantation ◽

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Applications of cluster ion implantation in microelectronics devices

10.1063/1.59254 ◽

1999 ◽

Author(s):

Isao Yamada ◽

Jiro Matsuo ◽

Noriaki Toyoda ◽

Takaaki Aoki

Keyword(s):

Ion Implantation ◽

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Study of damage formation by low-energy boron cluster ion implantation

Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on ◽

10.1109/iit.2002.1258066 ◽

2002 ◽

Author(s):

T. Aoki ◽

J. Matsuo ◽

G. Takaoka

Keyword(s):

Ion Implantation ◽

Boron Cluster ◽

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