Shallow junction formation by polyatomic cluster ion implantation

1997 ◽  
Vol 121 (1-4) ◽  
pp. 345-348 ◽  
Author(s):  
D. Takeuchi ◽  
N. Shimada ◽  
J. Matsuo ◽  
I. Yamada
Keyword(s):  
Ion Implantation ◽  
Shallow Junction ◽  
Junction Formation ◽  
Cluster Ion

Silicided shallow junction formation by ion implantation of impurity ions into silicide layers and subsequent drive‐in

1987 ◽  
Vol 61 (11) ◽  
pp. 5084-5088 ◽  
Author(s):  
D. L. Kwong ◽  
Y. H. Ku ◽  
S. K. Lee ◽  
E. Louis ◽  
N. S. Alvi ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Shallow Junction ◽  
Junction Formation ◽  
Impurity Ions

Boron ion implantation through Mo and Mo silicide layers for shallow junction formation

1991 ◽  
Vol 69 (7) ◽  
pp. 3962-3967 ◽  
Author(s):  
R. Angelucci ◽  
S. Solmi ◽  
A. Armigliato ◽  
S. Guerri ◽  
M. Merli ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Shallow Junction ◽  
Junction Formation
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