Thermomigration-Based Junction Isolation of Bulk Silicon MEMS Devices

2006 ◽  
Vol 15 (5) ◽  
pp. 1131-1138 ◽  
Author(s):  
C.C. Chung ◽  
M.G. Allen
Keyword(s):  
Mems Devices ◽  
Bulk Silicon

Deposition and Characterization of Al2O3 and BiFeO3 Thin Films on Titanium Substrates for Tough MEMS Devices

2017 ◽  
Vol 137 (1) ◽  
pp. 46-47
Author(s):  
Takeshi Kohno ◽  
Masato Mihara ◽  
Ataru Tanabe ◽  
Takashi Abe ◽  
Masanori Okuyama ◽  
...  
Keyword(s):  
Thin Films ◽  
Mems Devices ◽  
Titanium Substrates

Research in Mechanics of MEMS Devices

2000 ◽  
Author(s):  
D. J. Chang ◽  
S. T. Amimoto ◽  
A. D. Birkitt
Keyword(s):  
Mems Devices

Actuator for Out-of-Plane MEMS Devices

2001 ◽  
Author(s):  
A. D. Johnson ◽  
Vikas Gupta
Keyword(s):  
Mems Devices ◽  
Out Of Plane
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