Deposition and Characterization of Al2O3 and BiFeO3 Thin Films on Titanium Substrates for Tough MEMS Devices

2017 ◽  
Vol 137 (1) ◽  
pp. 46-47
Author(s):  
Takeshi Kohno ◽  
Masato Mihara ◽  
Ataru Tanabe ◽  
Takashi Abe ◽  
Masanori Okuyama ◽  
...  
Keyword(s):  
Thin Films ◽  
Mems Devices ◽  
Titanium Substrates

scholarly journals AFM Nanotribomechanical Characterization of Thin Films for MEMS Applications

Micromachines ◽  
2021 ◽  
Vol 13 (1) ◽  
pp. 23
Author(s):  
Corina Bîrleanu ◽  
Marius Pustan ◽  
Florina Șerdean ◽  
Violeta Merie
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Microelectromechanical Systems ◽  
Mems Devices ◽  
Force Microscopy ◽  
Atomic Force ◽  
Fundamental Understanding ◽  
Quantitative Analyses ◽  
Efficiency And Reliability

Nanotribological studies of thin films are needed to develop a fundamental understanding of the phenomena that occur to the interface surfaces that come in contact at the micro and nanoscale and to study the interfacial phenomena that occur in microelectromechanical systems (MEMS/NEMS) and other applications. Atomic force microscopy (AFM) has been shown to be an instrument capable of investigating the nanomechanical behavior of many surfaces, including thin films. The measurements of tribo-mechanical behavior for MEMS materials are essential when it comes to designing and evaluating MEMS devices. A great deal of research has been conducted to evaluate the efficiency and reliability of different measurements methods for mechanical properties of MEMS material; nevertheless, the technologies regarding manufacturing and testing MEMS materials are not fully developed. The objectivesof this study are to focus on the review of the mechanical and tribological advantages of thin film and to highlight the experimental results of some thin films to obtain quantitative analyses, the elastic/plastic response and the nanotribological behavior. The slight fluctuation of the results for common thin-film materials is most likely due to the lack of international standardization for MEMS materials and for the methods used to measure their properties.

On-Chip Young’s Modulus Characterization of the Effect of Phosphorus Heavy Doping on Polysilicon Thin Films

2009 ◽  
Author(s):  
E. Bassiachvili ◽  
P. Nieva ◽  
A. Khajepour
Keyword(s):  
Thin Films ◽  
Young’S Modulus ◽  
Doping Concentration ◽  
Young's Modulus ◽  
Bottom Layer ◽  
Phosphorus Concentration ◽  
Mems Devices ◽  
Heavy Doping ◽  
On Chip

Information on material properties of structural thin films for MEMS fabrication is very limited. The small information available in the literature suggests that the Young’s modulus of structural thin films such as polysilicon can change up to 30% with heavy doping at room temperature. Accurate knowledge of these variations is critical for proper design as well as operation of MEMS devices, especially for applications that require them to be exposed to harsh environmental conditions. In this paper, devices for the on-chip characterization of the Young’s modulus of polysilicon as a function of the doping concentration conditions are presented. Analytical modeling has been performed to predict the change in the devices’ pull-in voltage as a function of doping concentration. The devices were fabricated using the PolyMUMPs process on two different polysilicon layers on the same chip separated by a layer of oxide. The top layer devices are heavily doped while the bottom layer devices are left lightly doped. The lightly doped devices serve as a reference, allowing some account for fabrication uncertainties in order to ensure consistent results. Devices for measuring in-plane stresses, out-of-plane stress gradients and specially designed resistor structures that account for the effect of contact resistance have also been fabricated to monitor these quantities while testing. The devices will be tested using a customized vacuum chamber to study the effect of phosphorus concentration on these structures.

Integrating Biomaterials into Microsystems: Formation and Characterization of Nanostructured Titania

2004 ◽  
Vol 820 ◽  
Author(s):  
Zuruzi Abu Samah ◽  
Blaine C. Butler ◽  
Emily R. Parker ◽  
Ayesha Ahmed ◽  
Heather M. Evans ◽  
...  
Keyword(s):  
Thin Films ◽  
Mems Devices ◽  
Electromechanical Systems ◽  
L Cells ◽  
Facile Fabrication ◽  
Rat Fibroblasts ◽  
Nanostructured Titania ◽  
Cells Cultured ◽  
Ti Films

AbstractWe demonstrate the facile fabrication of crack-free nanostructured crystalline titania into microsystems. Titania layers were formed by reacting Ti thin films, deposited by evaporation and sputtering, with aqueous H202. Cracks were observed in titania layers formed on blanket Ti films but absent on arrays of patterned Ti pads below a threshold dimension. Nanostructured titania formed from sputtered and evaporated Ti films consists of aligned fibrous and sponge-like nanoporous morphologies, respectively. Rat fibroblasts L-cells cultured on these titania fibers remain viable up to 3 days. These observations demonstrate the feasibility of this technique to integrate nanostructured titania into Nano|Micro-Electromechanical systems (N|MEMS) devices.

Pulsed laser growth and characterization of thin films on titanium substrates

2007 ◽  
Vol 253 (19) ◽  
pp. 8226-8230 ◽  
Author(s):  
L. Lavisse ◽  
J.M. Jouvard ◽  
L. Imhoff ◽  
O. Heintz ◽  
J. Korntheuer ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser ◽  
Titanium Substrates

Electron microscopic characterization of diamond thin films and substrates for diamond heteroepitaxial growth

1989 ◽  
Vol 47 ◽  
pp. 592-593
Author(s):  
J.B. Posthill ◽  
R.P. Burns ◽  
R.A. Rudder ◽  
Y.H. Lee ◽  
R.J. Markunas ◽  
...  
Keyword(s):  
Thin Films ◽  
Wide Band ◽  
Deposition Process ◽  
Heteroepitaxial Growth ◽  
Electron Microscopic ◽  
Wide Band Gap ◽  
Lattice Matching ◽  
Different Types ◽  
Diamond Thin Films

Because of diamond’s wide band gap, high thermal conductivity, high breakdown voltage and high radiation resistance, there is a growing interest in developing diamond-based devices for several new and demanding electronic applications. In developing this technology, there are several new challenges to be overcome. Much of our effort has been directed at developing a diamond deposition process that will permit controlled, epitaxial growth. Also, because of cost and size considerations, it is mandatory that a non-native substrate be developed for heteroepitaxial nucleation and growth of diamond thin films. To this end, we are currently investigating the use of Ni single crystals on which different types of epitaxial metals are grown by molecular beam epitaxy (MBE) for lattice matching to diamond as well as surface chemistry modification. This contribution reports briefly on our microscopic observations that are integral to these endeavors.

Preparation and Characterization of Laser Ablation Derived PZT Thin Films for Micro Actuators

2001 ◽  
Vol 121 (3) ◽  
pp. 124-128
Author(s):  
Zhan-Jie Wang ◽  
Wen-Mei Lin ◽  
Ryutaro Maeda
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Pzt Thin Films ◽  
Micro Actuators

Vapor Deposition Polymerization and Electrical Characterization of TPD Thin Films

2011 ◽  
Vol E94-C (2) ◽  
pp. 157-163 ◽  
Author(s):  
Masakazu MUROYAMA ◽  
Ayako TAJIRI ◽  
Kyoko ICHIDA ◽  
Seiji YOKOKURA ◽  
Kuniaki TANAKA ◽  
...  
Keyword(s):  
Thin Films ◽  
Vapor Deposition ◽  
Electrical Characterization

Preparation and Characterization of Polymer Blend (PVA/PEO) Filled with Methyl Orange Thin Films

2018 ◽  
Vol 14 (2) ◽  
pp. 221-234
Author(s):  
Ahmed Namah Mohamed ◽  
◽  
Jafer Fahdel Odah ◽  
Haider Tawfiq Naeem
Keyword(s):  
Thin Films ◽  
Methyl Orange ◽  
Polymer Blend

Galvanostatic Electrodeposition and Corrosion Characterization of Ni-Co Alloy Thin Films

2018 ◽  
Vol 8 (5) ◽  
pp. 792-799
Author(s):  
Shraddha Bais ◽  
R.K. Pathak
Keyword(s):  
Thin Films
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