Electrical isolation of bulk silicon MEMS devices via thermomigration

Author(s):  
C.C. Chung ◽  
M.G. Allen
Author(s):  
Joachim R. Sommer ◽  
Nancy R. Wallace

After Howell (1) had shown that ruthenium red treatment of fixed frog skeletal muscle caused collapse of the intermediate cisternae of the sarcoplasmic reticulum (SR), forming a pentalaminate structure by obi iterating the SR lumen, we demonstrated that the phenomenon involves the entire SR including the nuclear envelope and that it also occurs after treatment with other cations, including calcium (2,3,4).From these observations we have formulated a hypothesis which states that intracellular calcium taken up by the SR at the end of contraction causes the M rete to collapse at a certain threshold concentration as the first step in a subsequent centrifugal zippering of the free SR toward the junctional SR (JSR). This would cause a) bulk transport of SR contents, such as calcium and granular material (4) into the JSR and, b) electrical isolation of the free SR from the JSR.


2017 ◽  
Vol 137 (1) ◽  
pp. 46-47
Author(s):  
Takeshi Kohno ◽  
Masato Mihara ◽  
Ataru Tanabe ◽  
Takashi Abe ◽  
Masanori Okuyama ◽  
...  

2018 ◽  
Author(s):  
Ho Seok Song ◽  
Eun Ji Park ◽  
Tae Hwan Kim ◽  
Dong Hae Kang ◽  
Jong Taek Hong ◽  
...  

Abstract Efficient and effective failure analysis (FA) of low-resistive defect was studied by using layout-aware and volume diagnosis. Small or marginal defect is one of the most difficult defectivities to identify during FA effort, especially if defect-induced resistance is not as high as the electrical isolation can detect. Here, we used new analysis methodologies, particularly using layout-aware and volume diagnosis, and prioritizing patterns in terms of a defective risk for following FA. The actual FA work verified that new analysis methodologies successfully identified low-resistive defect of Back-End-of-Line (BEOL) which was not detected by a conventional way and efficiently reduced the turn-around time (TAT) of physical failure analysis (PFA) by 57%, prompting fast feedback to fab.


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