Sacrificial Materials and Release Etchants for Metal MEMS That Reduce or Eliminate Hydrogen-Induced Residual Stress Change

Author(s):  
Longchang Ni ◽  
Maarten P. de Boer
2022 ◽  
Vol 50 (3) ◽  
pp. 20210457
Author(s):  
Wanhua Liang ◽  
James Pineault ◽  
F. Albrecht Conle ◽  
Timothy H. Topper

2017 ◽  
Vol 2017.55 (0) ◽  
pp. K0303
Author(s):  
Nuwan KARUNATHILAKA ◽  
Naoya TADA ◽  
Takeshi UEMORI ◽  
Toshiya NAKATA ◽  
Masahiro KAWANO

Procedia CIRP ◽  
2020 ◽  
Vol 87 ◽  
pp. 186-191
Author(s):  
Ewald Kohls ◽  
Robert Zmich ◽  
Carsten Heinzel ◽  
Daniel Meyer

2002 ◽  
Vol 239 (1-3) ◽  
pp. 570-572 ◽  
Author(s):  
S.M. Na ◽  
S.J. Suh ◽  
H.J. Kim ◽  
S.H. Lim

Procedia CIRP ◽  
2016 ◽  
Vol 45 ◽  
pp. 51-54 ◽  
Author(s):  
Sven Kuschel ◽  
Benjamin Kolkwitz ◽  
Jens Sölter ◽  
Ekkard Brinksmeier ◽  
Carsten Heinzel

Author(s):  
J. Fang ◽  
H. M. Chan ◽  
M. P. Harmer

It was Niihara et al. who first discovered that the fracture strength of Al2O3 can be increased by incorporating as little as 5 vol.% of nano-size SiC particles (>1000 MPa), and that the strength would be improved further by a simple annealing procedure (>1500 MPa). This discovery has stimulated intense interest on Al2O3/SiC nanocomposites. Recent indentation studies by Fang et al. have shown that residual stress relief was more difficult in the nanocomposite than in pure Al2O3. In the present work, TEM was employed to investigate the microscopic mechanism(s) for the difference in the residual stress recovery in these two materials.Bulk samples of hot-pressed single phase Al2O3, and Al2O3 containing 5 vol.% 0.15 μm SiC particles were simultaneously polished with 15 μm diamond compound. Each sample was cut into two pieces, one of which was subsequently annealed at 1300° for 2 hours in flowing argon. Disks of 3 mm in diameter were cut from bulk samples.


Sign in / Sign up

Export Citation Format

Share Document