A new method to determine the mechanical resonance frequency, quality factor and charging in electrostatically actuated MEMS

2008 ◽  
Author(s):  
S. Kalicinski ◽  
H.A.C. Tilmans ◽  
M. Wevers ◽  
I. De Wolf
Keyword(s):  
Resonance Frequency ◽  
Quality Factor ◽  
New Method ◽  
Mechanical Resonance ◽  
Electrostatically Actuated

Performance of Thin-film a-Si:H Microresonators in Dissipative Media

2006 ◽  
Vol 910 ◽  
Author(s):  
Teresa Adrega ◽  
D. M.F. Prazeres ◽  
V. Chu ◽  
J.P. Conde
Keyword(s):  
Thin Film ◽  
Resonance Frequency ◽  
Quality Factor ◽  
Deionized Water ◽  
Small Decrease ◽  
Field Screening ◽  
Electrostatically Actuated ◽  
At Resonance ◽  
Operating Medium ◽  
Dissipative Media

AbstractThe resonance of electrostatically actuated thin-film a-Si:H microbridges immersed in de-ionized water is detected and characterized. When the operating medium changes from vacuum to air, a small decrease of 5% of the resonance frequency occurs and the quality factor decreases from approximately 1000 to 100. The operation of the microresonators in deionized water produces a 60% shift in resonance frequency to lower values and the quality factor decreases to 10. Appropriate actuation conditions at resonance in water are used to avoid electrolysis and electrode field screening. The detection of the resonance frequency of a microbridge operating in solutions with high conductivities, up to 8 mS/cm, and viscosities up to 0.2 Pa.s is demonstrated.

scholarly journals Dynamic Responses of Electrically Driven Quartz Tuning Fork and qPlus Sensor: A Comprehensive Electromechanical Model for Quartz Tuning Fork

Sensors ◽  
2019 ◽  
Vol 19 (12) ◽  
pp. 2686
Author(s):  
Manhee Lee ◽  
Bongsu Kim ◽  
Sangmin An ◽  
Wonho Jhe
Keyword(s):  
Resonance Frequency ◽  
Quality Factor ◽  
Tuning Fork ◽  
Quartz Tuning Fork ◽  
Dynamic Responses ◽  
Peak Amplitude ◽  
Quantitative Prediction ◽  
Dynamic Features ◽  
Electromechanical Model ◽  
Different Characteristics

A quartz tuning fork and its qPlus configuration show different characteristics in their dynamic features, including peak amplitude, resonance frequency, and quality factor. Here, we present an electromechanical model that comprehensively describes the dynamic responses of an electrically driven tuning fork and its qPlus configuration. Based on the model, we theoretically derive and experimentally validate how the peak amplitude, resonance frequency, quality factor, and normalized capacitance are changed when transforming a tuning fork to its qPlus configuration. Furthermore, we introduce two experimentally measurable parameters that are intrinsic for a given tuning fork and not changed by the qPlus configuration. The present model and analysis allow quantitative prediction of the dynamic characteristics in tuning fork and qPlus, and thus could be useful to optimize the sensors’ performance.

Control Algorithm Study for some Optical Tracking Measurement System with Low Mechanical Resonance Frequency

2011 ◽  
Vol 188 ◽  
pp. 241-245
Author(s):  
Yong Li Bi ◽  
Zhong Xian Wang
Keyword(s):  
Linear System ◽  
Resonance Frequency ◽  
Control Algorithm ◽  
Fuzzy Controller ◽  
Controller Design ◽  
Optical Tracking ◽  
Mechanical Resonance ◽  
Non Linear ◽  
Non Linear System ◽  
Tracking Measurement

For some optical tracking measurement systems, because their size, weight and space structure are very strict restrictions, DC servo motors have to drive the loads through the several stages of gear transmission. For such a nonlinear controlled object, it is difficult to obtain acceptable control performance applying the traditional controller design method. In the paper, firstly, establish such a non-linear system dynamic model, and consider intelligent control algorithm to inhibit mechanical resonance effect for the control system performance. In order to achieve real-time control easily, the paper suggests a fuzzy numeric model with the self-regulating factor based on analytic expression for such a non-linear system. The result demonstrates that the fuzzy controller is very effective in applications. This work provides a new thought for a controller design to inhibit the low mechanical resonance frequency.

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