A new characterization method for electrostatically actuated resonant MEMS: Determination of the mechanical resonance frequency, quality factor and dielectric charging

2009 ◽  
Vol 154 (2) ◽  
pp. 304-315 ◽  
Author(s):  
S. Kalicinski ◽  
H.A.C. Tilmans ◽  
M. Wevers ◽  
I. De Wolf
2006 ◽  
Vol 910 ◽  
Author(s):  
Teresa Adrega ◽  
D. M.F. Prazeres ◽  
V. Chu ◽  
J.P. Conde

AbstractThe resonance of electrostatically actuated thin-film a-Si:H microbridges immersed in de-ionized water is detected and characterized. When the operating medium changes from vacuum to air, a small decrease of 5% of the resonance frequency occurs and the quality factor decreases from approximately 1000 to 100. The operation of the microresonators in deionized water produces a 60% shift in resonance frequency to lower values and the quality factor decreases to 10. Appropriate actuation conditions at resonance in water are used to avoid electrolysis and electrode field screening. The detection of the resonance frequency of a microbridge operating in solutions with high conductivities, up to 8 mS/cm, and viscosities up to 0.2 Pa.s is demonstrated.


Author(s):  
Ingrid Kästel ◽  
Giles de Quincey ◽  
Jörg Neugebauer ◽  
Robert Sader ◽  
Peter Gehrke

Abstract Background There is disagreement about the optimal torque for tightening smartpegs for resonance frequency analysis (RFA). Subjective finger pressure during hand tightening could affect the reliability of the resulting values. The aim of the current study was therefore to assess whether or not the insertion torque of a smartpeg magnetic device influences the implant stability quotient (ISQ) value during RFA. Methods Thirty self-tapping screw implants (XiVE S, Dentsply Sirona Implants, Bensheim, Germany) with a diameter of 3.8 mm and a length of 11 mm were inserted in three cow ribs with a bone quality of D1. The RFA value of each implant was measured (Ostell, FA W&H Dentalwerk, Bürmoos, Austria) in two orthogonal directions (mesial and buccal) after tightening the corresponding smartpeg type 45 with a mechanically defined value of 5 Ncm (Meg Torq device, Megagen, Daegu, South Korea) (test). Additionally, 4 different examiners measured the RFA after hand tightening the smartpegs, and the results were compared (control). Insertion torque values were determined by measuring the unscrew torque of hand seated smartpegs (Tohnichi Manufacturing Co. Ltd, Tokyo, Japan). Results The ISQ values varied from 2 to 11 Ncm by hand tightening and from 2 to 6 Ncm by machine tightening. The comparison of hand and machine tightening of smartpegs displayed only minor differences in the mean ISQ values with low standard deviations (mesial 79.76 ± 2,11, buccal 77.98 ± 2,) and no statistical difference (mesial p = 0,343 and buccal p = 0,890). Conclusions Manual tightening of smartpeg transducers allows for an objective and reliable determination of ISQ values during RFA.


2008 ◽  
Vol 93 (26) ◽  
pp. 261110 ◽  
Author(s):  
Yousef Nazirizadeh ◽  
Uli Lemmer ◽  
Martina Gerken

2013 ◽  
Vol 26 (3) ◽  
pp. 239-245
Author(s):  
M. Koutsoureli ◽  
L. Michalas ◽  
G. Papaioannou

The assessment of dielectric charging in MEMS capacitive switches is investigated. The information can be obtained only from simultaneous assessment of Metal-Insulator-Metal capacitance and MEMS capacitive switches the former allowing the determination of material properties and the latter of the device.


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