Large-displacement parametric resonance using a shaped comb drive

Author(s):  
Congzhong Guo ◽  
Erdinc Tatar ◽  
Gary K. Fedder
2005 ◽  
Vol 2005.40 (0) ◽  
pp. 228-229
Author(s):  
Fuminori BOUNO ◽  
Kazuhiro HANE ◽  
Minoru SASAKI

2019 ◽  
Vol 25 (8) ◽  
pp. 3111-3118 ◽  
Author(s):  
Phuc Hong Pham ◽  
Kien Trung Hoang ◽  
Dich Quang Nguyen

2015 ◽  
Vol 645-646 ◽  
pp. 1115-1119
Author(s):  
Wei Min Wang ◽  
Sheng Mei Yan ◽  
Qiang Wang ◽  
Chuan Kai Qiu ◽  
Ze Xiang Chen ◽  
...  

A micromirror fabricated by surface micromachined process is developed. The developed micromirror contains four pre-stress comb-drive actuators, which support tip/tilt/piston degrees of freedom. Pre-stress comb-drive actuators have the advantage of large displacement and fast response. Prototype is fabricated by a commercially available MEMS surface micromachined process. Experimental results indicate that the device can realize designed function and have the potential in MOEMS applications.


Author(s):  
C. L. Ku ◽  
R. Chen ◽  
Y. C. Chen

Comb-drive electrostatic actuators have been widely applied to steer a gripper, an acceleratometer, a scanning mirror, and a xy-stage because their output forces are easily controlled and capacitively sensed. To obtain large displacement with low drive voltage, a comb-drive actuator has to be designed with narrower gap and larger overlapping area between two electrodes. As a result, it will induce the instability or side sticking during operation; that is, the stationary and the moving electrodes will stick together and the actuator fails to operate. Furthermore, due to the asymmetric electrodes caused by inevitably imperfect fabrication of the actuator, the comb-drive actuator may be unstable for a large displacement, resulting from the unbalanced electrostatic forces between two electrodes. We report a novel design, which utilizes a set of extra electrode structure to compensate the unbalanced electrostatic forces. Simulation results demonstrated that the larger displacement is achieved while the size of the comb-drive actuator keeps the same. For better performance, the design of electrode structure and the number of electrodes are discussed in this report.


2019 ◽  
Vol 28 (3) ◽  
pp. 351-361 ◽  
Author(s):  
Haijun Li ◽  
Paul Barnes ◽  
Eric Harding ◽  
Xiyu Duan ◽  
Thomas D. Wang ◽  
...  

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