Design and Analysis of a Comb-Drive Actuator for Large Displacement

2005 ◽  
Author(s):  
C. L. Ku ◽  
R. Chen ◽  
Y. C. Chen
Keyword(s):  
Large Displacement ◽  
Electrostatic Forces ◽  
Electrode Structure ◽  
Comb Drive ◽  
Electrostatic Actuators ◽  
Drive Voltage ◽  
Scanning Mirror ◽  
Simulation Results ◽  
Asymmetric Electrodes ◽  
Novel Design

Comb-drive electrostatic actuators have been widely applied to steer a gripper, an acceleratometer, a scanning mirror, and a xy-stage because their output forces are easily controlled and capacitively sensed. To obtain large displacement with low drive voltage, a comb-drive actuator has to be designed with narrower gap and larger overlapping area between two electrodes. As a result, it will induce the instability or side sticking during operation; that is, the stationary and the moving electrodes will stick together and the actuator fails to operate. Furthermore, due to the asymmetric electrodes caused by inevitably imperfect fabrication of the actuator, the comb-drive actuator may be unstable for a large displacement, resulting from the unbalanced electrostatic forces between two electrodes. We report a novel design, which utilizes a set of extra electrode structure to compensate the unbalanced electrostatic forces. Simulation results demonstrated that the larger displacement is achieved while the size of the comb-drive actuator keeps the same. For better performance, the design of electrode structure and the number of electrodes are discussed in this report.

scholarly journals Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation

2021 ◽  
Vol 7 (1) ◽  
Author(s):  
Anton Melnikov ◽  
Hermann A. G. Schenk ◽  
Jorge M. Monsalve ◽  
Franziska Wall ◽  
Michael Stolz ◽  
...  
Keyword(s):  
Finite Element ◽  
Microelectromechanical Systems ◽  
Dynamic Range ◽  
Dynamic Performance ◽  
Major Step ◽  
Element Analysis ◽  
Electrostatic Actuators ◽  
Voltage Range ◽  
Drive Voltage ◽  
Depth Analysis

AbstractElectrostatic micromechanical actuators have numerous applications in science and technology. In many applications, they are operated in a narrow frequency range close to resonance and at a drive voltage of low variation. Recently, new applications, such as microelectromechanical systems (MEMS) microspeakers (µSpeakers), have emerged that require operation over a wide frequency and dynamic range. Simulating the dynamic performance under such circumstances is still highly cumbersome. State-of-the-art finite element analysis struggles with pull-in instability and does not deliver the necessary information about unstable equilibrium states accordingly. Convincing lumped-parameter models amenable to direct physical interpretation are missing. This inhibits the indispensable in-depth analysis of the dynamic stability of such systems. In this paper, we take a major step towards mending the situation. By combining the finite element method (FEM) with an arc-length solver, we obtain the full bifurcation diagram for electrostatic actuators based on prismatic Euler-Bernoulli beams. A subsequent modal analysis then shows that within very narrow error margins, it is exclusively the lowest Euler-Bernoulli eigenmode that dominates the beam physics over the entire relevant drive voltage range. An experiment directly recording the deflection profile of a MEMS microbeam is performed and confirms the numerical findings with astonishing precision. This enables modeling the system using a single spatial degree of freedom.

scholarly journals Driving force profile design in comb drive electrostatic actuators using a level set-based shape optimization method

2014 ◽  
Vol 51 (2) ◽  
pp. 369-383 ◽  
Author(s):  
Takayo Kotani ◽  
Takayuki Yamada ◽  
Shintaro Yamasaki ◽  
Makoto Ohkado ◽  
Kazuhiro Izui ◽  
...  
Keyword(s):  
Shape Optimization ◽  
Level Set ◽  
Driving Force ◽  
Optimization Method ◽  
Comb Drive ◽  
Electrostatic Actuators ◽  
Force Profile ◽  
Profile Design

Design of a Microfluidic Chip for Enrichment of Circulating Tumor Cells

2015 ◽  
Vol 645-646 ◽  
pp. 1320-1325
Author(s):  
Xi Xin Ling ◽  
Da Hai Ren ◽  
Zheng You
Keyword(s):  
Tumor Cells ◽  
Circulating Tumor Cells ◽  
Microfluidic Chip ◽  
Comsol Multiphysics ◽  
Enrichment Method ◽  
Cancer Metastases ◽  
Simulation Results ◽  
Novel Design ◽  
Identification And Characterization

Identification and characterization of CTCs can be used as a tool for the study of cancer metastases. A novel design of microfluidic chip used for enrichment of circulating tumor cells is presented in this paper. An integration of DLD method and negative enrichment method were designed to improve the throughput and recovery rate while getting intact CTCs. The DLD stage is used to separate CTCs from blood cells preliminarily, and the negative enrichment stage is used to acquire purified CTCs. Both of them were simulated with COMSOL Multiphysics. Simulation results showed that triangular micro-posts have better performance in DLD stage, and wave structures could generate better disturbance effect than herringbone structures. This chip provides a potential approach with high throughput and purity for the enrichment of CTCs.

Novel Design for Surface Plasmon Resonance Lenses

2015 ◽  
Vol 36 (4) ◽  
Author(s):  
Kao-Der Chang ◽  
Ruei-Chang Lu ◽  
Yu-Ping Liao ◽  
Keh-Yi Lee
Keyword(s):  
Surface Plasmon Resonance ◽  
Surface Plasmon ◽  
Plasmon Resonance ◽  
The Novel ◽  
Field Region ◽  
Simulation Results ◽  
Novel Design ◽  
Extra Structure ◽  
Sub Wavelength

AbstractNew design for surface plasmon resonance (SPR) lens having a sub-wavelength size of spot in the far-field region is proposed in this work. An extra structure of concentrically annular grating fabricated on the top surface of SPR lens is utilized to improve the quality of focusing. Numerical simulation results of the novel type of SPR lenses with different grating structures are presented and compared.

Multiple path generation by a flexible four-bar mechanism using ionic polymer metal composite

2012 ◽  
Vol 23 (12) ◽  
pp. 1379-1393 ◽  
Author(s):  
Ravi K Jain ◽  
Somajoyti Majumder ◽  
Ashish Dutta
Keyword(s):  
Bending Moment ◽  
Design Parameters ◽  
Metal Composite ◽  
Ionic Polymer Metal Composite ◽  
Ionic Polymer ◽  
Adams Software ◽  
Multiple Paths ◽  
Polymer Metal ◽  
Simulation Results ◽  
Novel Design

This article presents a novel design of a flexible four-bar crank–rocker mechanism using ionic polymer metal composite for generating multiple paths, which can be applied in microassembly. In order to control the deflection of links and the resultant path, active ionic polymer metal composite patches are fixed on the coupler and are actuated by a voltage (0–3 V direct current). The main focus of this article is to determine the number, size, and location of the ionic polymer metal composite patches to be used on the coupler to get a desired path. A dynamic model of the mechanism is made in ADAMS software and the design parameters are identified. A mathematical model of ionic polymer metal composite patch is developed through experiments to achieve the bending moment relationship with voltage, and this is used while simulating its behaviors. The simulation results show that the proposed mechanism can generate multiple paths, using different voltages for ionic polymer metal composite activation. The proposed mechanism is then fabricated, and experiments are carried out to compare the experimental and simulation results. It is proved that the proposed new mechanism is superior to earlier designs of four bars using ionic polymer metal composite, and the paths generated can more effectively be controlled.

A Novel Design of PIE Decoding with Multiple CRC Circuit for RFID Tag

2013 ◽  
Vol 816-817 ◽  
pp. 957-961
Author(s):  
Feng Ying Huang ◽  
Jun Wang ◽  
Yu Sen Xu ◽  
Ji Wei Huang
Keyword(s):  
Data Processing ◽  
Parallel Algorithm ◽  
Radio Frequency Identification ◽  
High Frequency ◽  
Pulse Interval ◽  
Uhf Rfid ◽  
Rfid Tag ◽  
Frequency Identification ◽  
Simulation Results ◽  
Novel Design

This paper proposes a new synchronized serial-parallel CRC(Cycle Redundancy Check) with PIE(Pulse Interval Encoding) decoding circuit for the UHF(Ultra-High Frequency) RFID(Radio Frequency Identification), which is based on the ISO/IEC 18000-6C standards protocol. The parallel algorithm of CRC circuit is derived, and the serial or parallel CRC circuit on RFID tag chip is evaluated in this paper. Finally, the designed circuit is simulated and analyzed on the FPGA platform. Simulation results show that the proposed circuit meets the communication requirement of the protocol and addresses the problem of low data processing rate of conventional serial CRC circuit, as well as implements 1 to 8 degree of parallelism of the parallel CRC circuit for UHF RFID.

Bulk micromachined silicon comb-drive electrostatic actuators with diode isolation

1997 ◽  
Vol 63 (1) ◽  
pp. 61-67 ◽  
Author(s):  
R.R.A. Syms ◽  
B.M. Hardcastle ◽  
R.A. Lawes
Keyword(s):  
Comb Drive ◽  
Electrostatic Actuators

Optimization of a Novel Micro-Hotplate for Gas Sensor

2013 ◽  
Vol 423-426 ◽  
pp. 2317-2320
Author(s):  
Chang Chun Li ◽  
Xiao Bo Zhang ◽  
Li Liu
Keyword(s):  
Temperature Distribution ◽  
Gas Sensor ◽  
Uniform Temperature ◽  
Si Substrate ◽  
Uniform Temperature Distribution ◽  
Sensor Sensitivity ◽  
Electrode Space ◽  
Higher Temperature ◽  
Simulation Results ◽  
Novel Design

A novel design of micro-hotplate is proposed for micro-structural gas sensor. The simulation results of ANSYS reveal that higher temperature and more uniform temperature distribution was achieved in the micro-hotplate when the thickness of SiO2, thickness of Si substrate, electrode width and electrode space were designed to be 100, 200, 20 and 230 μm, respectively. The new micro-hotplate is benefit for the improvement of sensor sensitivity.

scholarly journals Cross-Slot Antenna with U-Shaped Tuning Stub for Ultra-Wideband Applications

2008 ◽  
Vol 2008 ◽  
pp. 1-6 ◽  
Author(s):  
Dawood Seyed Javan ◽  
Mohammad Ali Salari ◽  
Omid Hashemi Ghoochani
Keyword(s):  
Radiation Pattern ◽  
Ultra Wideband ◽  
Slot Antenna ◽  
Impedance Bandwidth ◽  
Design Procedures ◽  
Linearly Polarized ◽  
Dimensional Parameters ◽  
Simulation Results ◽  
Novel Design ◽  
Better Than

A novel design of an ultra-wideband (UWB) slot antenna is presented. This antenna operates as a transmitter and receiver antenna. Effects of the antenna dimensional parameters are studied through experimental and simulation results. Design procedures are developed and verified for different frequency bands. The experimental and simulation results exhibit good impedance bandwidth, radiation pattern, and relatively constant gain over the entire band of frequency. Antenna gain and directivity at boresight and in their maximum states are close to each other and indicate high radiation efficiency. To use the antenna as a linearly polarized antenna, the radiation pattern in E-plane is better thanthat inH-plane.

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