Piezoelectric properties of ScAlN thin films for piezo-MEMS devices

2013 ◽  
Author(s):  
Keiichi Umeda ◽  
H. Kawai ◽  
A. Honda ◽  
M. Akiyama ◽  
T. Kato ◽  
...  
Keyword(s):  
Thin Films ◽  
Piezoelectric Properties ◽  
Mems Devices

scholarly journals Ferroelectric and Ferroelastic Domain Related Formation and Influential Mechanisms of Vapor Deposited Piezoelectric Thin Films

Coatings ◽  
2021 ◽  
Vol 11 (12) ◽  
pp. 1437
Author(s):  
Chu Chen ◽  
Jian Song ◽  
Qi Zhang ◽  
Mingyu Gong ◽  
Yue Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
Piezoelectric Properties ◽  
Piezoelectric Materials ◽  
Micro Electro Mechanical System ◽  
Domain Engineering ◽  
Electrostatic Energy ◽  
Formation Mechanisms ◽  
Mems Devices ◽  
Structure Property ◽  
Piezoelectric Thin Films

Compared to the bulk piezoelectric materials counterpart, piezoelectric thin films (PTFs) possess advantages of smaller size, lower power consumption, better sensitivity, and have broad application in advanced micro-electro-mechanical system (MEMS) devices. However, the performance of MEMS transducers and actuators are largely limited by PTFs piezoelectric properties. In this review, we focus on understanding structure-property relationship of vapor deposited PTFs, with emphasis on the effect of strain energy and electrostatic energy in thin films, especially, energy relaxation induced misfit dislocation and ferroelectric (FS) and ferroelastic (FC) domain formation mechanisms. We then discuss the microstructure of these domains and their influential mechanisms on piezoelectric properties, as well as the domain engineering strategies (i.e., internal and external stimuli). This review will motivate further experimental, theoretical, and simulation studies on FS and FC domain engineering in PTFs.

Deposition and Characterization of Al2O3 and BiFeO3 Thin Films on Titanium Substrates for Tough MEMS Devices

2017 ◽  
Vol 137 (1) ◽  
pp. 46-47
Author(s):  
Takeshi Kohno ◽  
Masato Mihara ◽  
Ataru Tanabe ◽  
Takashi Abe ◽  
Masanori Okuyama ◽  
...  
Keyword(s):  
Thin Films ◽  
Mems Devices ◽  
Titanium Substrates

Growth and piezoelectric properties of amorphous and crystalline (K1−xNax)NbO3−based thin films

2021 ◽  
Author(s):  
Jong-Un Woo ◽  
Sun-Woo Kim ◽  
Dae-Su Kim ◽  
In-Su Kim ◽  
Ho-Sung Shin ◽  
...  
Keyword(s):  
Thin Films ◽  
Piezoelectric Properties

Optimization of the annealing process and nanoscale piezoelectric properties of (002) AlN thin films

2017 ◽  
Vol 28 (13) ◽  
pp. 9295-9300 ◽  
Author(s):  
Bangran Fu ◽  
Fang Wang ◽  
Rongrong Cao ◽  
Yemei Han ◽  
Yinping Miao ◽  
...  
Keyword(s):  
Thin Films ◽  
Piezoelectric Properties ◽  
Annealing Process

scholarly journals Correlation between nanomechanical and piezoelectric properties of thin films: An experimental and finite element study

2013 ◽  
Vol 90 ◽  
pp. 148-151 ◽  
Author(s):  
Hussein Nili ◽  
Guang Cheng ◽  
T.A. Venkatesh ◽  
Sharath Sriram ◽  
Madhu Bhaskaran
Keyword(s):  
Thin Films ◽  
Finite Element ◽  
Piezoelectric Properties ◽  
Finite Element Study ◽  
Element Study

Characterization of Nanomechanical, Ferroelectric, and Piezoelectric Properties by Nanoindentation and Piezoresponse Force Microscopy of PbTiO3 Thin Films

2013 ◽  
Vol 52 (40) ◽  
pp. 14328-14334 ◽  
Author(s):  
Juan Ramos-Cano ◽  
Mario Miki-Yoshida ◽  
André Marino Gonçalves ◽  
José Antônio Eiras ◽  
Jesús González-Hernández ◽  
...  
Keyword(s):  
Thin Films ◽  
Piezoelectric Properties ◽  
Piezoresponse Force Microscopy ◽  
Force Microscopy ◽  
Ferroelectric And Piezoelectric Properties

LaNiO3 seed layer induced enhancement of piezoelectric properties in (100)-oriented (1−x)BZT–xBCT thin films

2015 ◽  
Vol 35 (7) ◽  
pp. 2041-2049 ◽  
Author(s):  
W.L. Li ◽  
T.D. Zhang ◽  
D. Xu ◽  
Y.F. Hou ◽  
W.P. Cao ◽  
...  
Keyword(s):  
Thin Films ◽  
Seed Layer ◽  
Piezoelectric Properties
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