scholarly journals Ferroelectric and Ferroelastic Domain Related Formation and Influential Mechanisms of Vapor Deposited Piezoelectric Thin Films

Coatings ◽  
2021 ◽  
Vol 11 (12) ◽  
pp. 1437
Author(s):  
Chu Chen ◽  
Jian Song ◽  
Qi Zhang ◽  
Mingyu Gong ◽  
Yue Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
Piezoelectric Properties ◽  
Piezoelectric Materials ◽  
Micro Electro Mechanical System ◽  
Domain Engineering ◽  
Electrostatic Energy ◽  
Formation Mechanisms ◽  
Mems Devices ◽  
Structure Property ◽  
Piezoelectric Thin Films

Compared to the bulk piezoelectric materials counterpart, piezoelectric thin films (PTFs) possess advantages of smaller size, lower power consumption, better sensitivity, and have broad application in advanced micro-electro-mechanical system (MEMS) devices. However, the performance of MEMS transducers and actuators are largely limited by PTFs piezoelectric properties. In this review, we focus on understanding structure-property relationship of vapor deposited PTFs, with emphasis on the effect of strain energy and electrostatic energy in thin films, especially, energy relaxation induced misfit dislocation and ferroelectric (FS) and ferroelastic (FC) domain formation mechanisms. We then discuss the microstructure of these domains and their influential mechanisms on piezoelectric properties, as well as the domain engineering strategies (i.e., internal and external stimuli). This review will motivate further experimental, theoretical, and simulation studies on FS and FC domain engineering in PTFs.

scholarly journals Piezoelectric materials parameters for piezoelectric thin films in GHz applications

2009 ◽  
Vol 1 (1) ◽  
pp. 19-27 ◽  
Author(s):  
P. Muralt ◽  
J. Conde ◽  
A. Artieda ◽  
F. Martin ◽  
M. Cantoni
Keyword(s):  
Thin Films ◽  
Piezoelectric Materials ◽  
Ferroelectric Materials ◽  
Bulk Acoustic Wave ◽  
Microstructural Parameters ◽  
Piezoelectric Thin Films ◽  
Film Bulk ◽  
New Applications ◽  
Acoustic Losses ◽  
Bulk Acoustic Wave Resonators

Piezoelectric thin films have existing and promising new applications in microwave filter technologies. The final performance depends on many parameters, and very specifically on the materials properties of each involved material. In this article, materials and properties for thin-film bulk acoustic wave resonators are discussed on some selected issues: the piezoelectric coefficients and acoustic losses of AlN, the relation of the first one with microstructural parameters, the inclusion of parasitic elements, and the merits of and problems with ferroelectric materials.

Piezoelectric Properties of Sol-Gel Derived PZT Thin Films with Various Zr/Ti Ratios

1997 ◽  
Vol 493 ◽  
Author(s):  
G. Teqwee ◽  
K. C. McCarthy ◽  
F. S. McCarthy ◽  
D. G. Davis ◽  
J. T. Dawley ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Single Phase ◽  
Piezoelectric Properties ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Piezoelectric Thin Films ◽  
Microelectromechanical Devices ◽  
Acoustic Wave Devices ◽  
Optical Lever

ABSTRACTPiezoelectric thin films are useful for application in microelectromechanical devices. A series of sol-gel derived PZT (lead zirconate titanate) thin films with various Zr/Ti ratios were prepared on platinized substrates. These films were fired to 650C - 700C to crystallize them into single-phase perovskite films, and their piezoelectric properties were measured using optical lever-based instrumentation. Large d33 piezoelectric coefficients up to 400 pm/V were obtained at the morphotropic phase boundary (PZT 53/47), making such films attractive in applications such as thin film transducers, microcanti levers and surface acoustic wave devices.

Flexible and Lead-free BCZT Thin Film Nanogenerator for Biocompatible Energy Harvesting

2021 ◽  
Author(s):  
Shiyuan Liu ◽  
Zhuomin Zhang ◽  
Yao Shan ◽  
Ying Hong ◽  
Fatma Farooqui ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Energy Harvesting ◽  
Medical Devices ◽  
High Performance ◽  
Piezoelectric Materials ◽  
Lead Free ◽  
Piezoelectric Thin Films

High-performance piezoelectric thin films generally contain toxic lead that limits the application scenarios especially on wearable and medical devices. Alternative lead-free piezoelectric materials such as Ba0.85Ca0.15-Zr0.1Ti0.9O3 (BCZT) have been proved...

Multi-domain BNiT modification enhanced the piezoelectric properties of BNT-based lead-free thin films

2020 ◽  
Vol 8 (47) ◽  
pp. 17114-17121
Author(s):  
Kun Zhu ◽  
Shuanghao Wu ◽  
Baijie Song ◽  
Guanglong Ge ◽  
Yunjing Shi ◽  
...  
Keyword(s):  
Thin Films ◽  
Environmental Protection ◽  
Materials Science ◽  
Piezoelectric Properties ◽  
Piezoelectric Materials ◽  
Lead Free

From the perspectives of environmental protection and health, new lead-free piezoelectric materials have become a research hotspot in the field of materials science.

scholarly journals Obtaining, structure, microstructure and dielectric characteristics of ceramics and thin films of ferro-piezoelectric materials based on the PZT system

2020 ◽  
Vol 10 (01n02) ◽  
pp. 2060003
Author(s):  
Inna Andryushina ◽  
Anatoliy Pavlenko ◽  
Sergey Zinchenko ◽  
Konstantin Andryushin ◽  
Lidiya Shilkina ◽  
...  
Keyword(s):  
Thin Films ◽  
Electric Field ◽  
Piezoelectric Properties ◽  
Bulk Material ◽  
Piezoelectric Materials ◽  
Hysteresis Loops ◽  
Dielectric Characteristics ◽  
Hard Materials ◽  
Alternating Electric Field ◽  
Capacitance Voltage

This paper presents the results of studies of the structure, microstructure, dependences of the piezoelectric properties on the electric field (dielectric hysteresis loops, reversible nonlinearity, deformation characteristics) and dielectric properties of the ceramic material PCR-13 (based on the PZT system) in the temperature range 300–900[Formula: see text]K and frequencies of an alternating electric field ([Formula: see text]) Hz. The character of the obtained dependences made it possible to attribute PCR-13 to ferro-hard materials. Using the HF cathodic sputtering method, PCR-13 thin films were fabricated on Si (001) substrates. It is shown that they are polycrystalline textured, while in comparison with bulk material, the film contains tensile stresses of the unit cell in the plane of the substrate and compresses in the perpendicular direction with the value [Formula: see text]. The capacitance-voltage characteristics of the Al/PCR-13/Si/Al heterostructure were studied. The reasons for the revealed patterns are discussed.

Enhanced piezoelectric properties of Ta substituted-(K0.5Na0.5)NbO3 films: A candidate for lead-free piezoelectric thin films

2011 ◽  
Vol 509 (20) ◽  
pp. L194-L198 ◽  
Author(s):  
Sun Young Lee ◽  
Chang Won Ahn ◽  
Jin Soo Kim ◽  
Aman Ullah ◽  
Hai Joon Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Piezoelectric Properties ◽  
Lead Free ◽  
Piezoelectric Thin Films

Deposition and Characterization of Al2O3 and BiFeO3 Thin Films on Titanium Substrates for Tough MEMS Devices

2017 ◽  
Vol 137 (1) ◽  
pp. 46-47
Author(s):  
Takeshi Kohno ◽  
Masato Mihara ◽  
Ataru Tanabe ◽  
Takashi Abe ◽  
Masanori Okuyama ◽  
...  
Keyword(s):  
Thin Films ◽  
Mems Devices ◽  
Titanium Substrates

Integration and Optimisation of PZT Piezoelectric Thin Films in Micro and Nano Dimensional Structures

2009 ◽  
Vol 1 (3) ◽  
pp. 214-225 ◽  
Author(s):  
D. Remiens ◽  
C. Soyer ◽  
D. Troadec ◽  
D. Deresmes ◽  
D. Jenkins ◽  
...  
Keyword(s):  
Thin Films ◽  
Piezoelectric Thin Films
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