Design and analysis of a 2-DOF micro-motion stage based on differential amplifier

2013 ◽  
Author(s):  
Xiaofeng Li ◽  
Yangmin Li
Keyword(s):  
Differential Amplifier ◽  
Micro Motion ◽  
Motion Stage

Design and Modeling of Compliant XY Micro-Motion Stage

2019 ◽  
pp. 407-414
Author(s):  
Santosh B. Jadhav ◽  
Kishor K. Dhande ◽  
Suhas P. Deshmukh
Keyword(s):  
Micro Motion ◽  
Motion Stage

Optimized design of a micro-motion stage with zero stiffness

2018 ◽  
Vol 26 (6) ◽  
pp. 1430-1440
Author(s):  
胡俊峰 HU Jun-feng ◽  
陈星星 CHEN Xing-xing
Keyword(s):  
Optimized Design ◽  
Micro Motion ◽  
Motion Stage

Design and Analysis of a XY Micro-Motion Stage Based on S Type Flexible Mechanism

2014 ◽  
Vol 635-637 ◽  
pp. 1216-1219
Author(s):  
Yue Min Yu
Keyword(s):  
Smart Materials ◽  
Piezoelectric Materials ◽  
Electrical Energy ◽  
Active Materials ◽  
Flexure Mechanism ◽  
Electromechanical Energy Conversion ◽  
Electromechanical Energy ◽  
Flexible Mechanism ◽  
Micro Motion ◽  
Motion Stage

Piezoelectric materials is a kind of the most common smart materials whose geometric shape can be related to an energy input in the form of electric field. In the application of active materials to electromechanical energy conversion, electrical energy may be input to the material and the resulting deformation of the material can be used to move a load. In this paper, a XY micro-motion stage is designed based s type flexure mechanism and driven through piezoelectric ceramic stack. From the analysis, it can achieve X direction 6.5μm, Y direction 9.7μm micro-displacement output.The results indicate that, the XY micro-motion stage all are satisfy the need of design.

scholarly journals Design, Fabrication and Testing of a Dual-Range XY Micro-Motion Stage Driven by Voice Coil Actuators

2017 ◽  
Vol 2 (3) ◽  
pp. 498-504
Author(s):  
Xavier Herpe ◽  
Matthew Dunnigan ◽  
Xianwen Kong
Keyword(s):  
Micro Motion ◽  
Motion Stage

A Novel Micro-Positioning Stage With Large-Stroke and Adjustable Stiffness

2021 ◽  
Author(s):  
Zhijun Yang ◽  
Bingyu Cai ◽  
Ruiqi Li ◽  
Hao Peng ◽  
Youdun Bai
Keyword(s):  
Large Deformation ◽  
Control Strategies ◽  
Operating Conditions ◽  
Flexure Hinge ◽  
Pid Algorithm ◽  
Wide Range ◽  
Non Linear ◽  
Micro Motion ◽  
Motion Stage ◽  
Application Requirements

Abstract The existing micro-motion stage based on flexure hinge can hardly meet the requirements of a high-precision stage with large stroke and variable operating conditions (especially variable frequency operation). In this paper, a flexible hinge micro-motion stage with adjustable stiffness is presented. A wide range of stiffness and frequency adjustments are realized by changing the length of the flexure hinge through the movement of the support. However, the change on the stiffness of the flexure hinge is non-linear when is in large deformation. It is difficult to use the traditional PID algorithm to control such nonlinear system without the complete mathematical model, and much more complicated control strategies are required to deal with the condition of large deformation of the flexure hinge. In this paper, the active disturbance rejection control (ADRC) strategy is adopted to solve the above non-linear control problem without relying on the complete system model. A novel model-compensated ADRC based on the dynamic characteristics is proposed to further improve the performance of the micro-motion stage. Experiments show that the ADRC with model compensation (MADRC) can achieve high positioning and tracking precision faster than the conventional ADRC. The presented micro-motion stage based on stiffness-adjustable flexure hinges and MADRC design is capable to meet the industrial application requirements of large stroke or variable working conditions.

Development of Micro-Force Sensor Based on 3-RRR Parallel Mechanism

2010 ◽  
Vol 36 ◽  
pp. 57-62 ◽  
Author(s):  
Peng Hao Hu ◽  
Yong Jie Li ◽  
Qian Cheng Zhao
Keyword(s):  
Sense Organ ◽  
Wheatstone Bridge ◽  
Force Sensor ◽  
Chain Structure ◽  
Parallel Structure ◽  
Strain Gauges ◽  
Precision Engineering ◽  
Micro Motion ◽  
Motion Stage ◽  
Micro Force Sensor

A new style micro-force sensor based on a 3-RRR parallel micro-motion stage which had been researching recent years was introduced in this paper. The sensor can be used in micro-force and micro-torque detection in precision engineering. The result and experience from 3-RRR micro-motion stage research bring this new idea. In the first place, the branched chain structure in motion stage needs to be simplified and improved to adapt to the requirement of sensor. Secondly, a mechanics model is constructed according to the sense organ structure. The Jacobin Matrix which is the most important matrix on parallel structure is analyzed and deduced. The relationship among key dimension is worked out through isotropy parameters. With the theory analysis, the final structure of sense organ is determined. The elastomeric sensor body was pasted with electrical-resistance strain gauges, after it was manufactured by Wire-EDM. Strain gauges employed Wheatstone bridge and amplifier AD620 to produce measuring data. Experiment has indicated that the new sensor is competent for micro-force detecting in X, Y direction and micro-moment around Z direction with high stability and reliability.

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